Arrangement and method for manually moving a container for storing objects through an environment
It is described an arrangement (20) for manually moving a container (16) for storing objects, particularly for storing disklike objects such as wafers, flat panels or CDs, through an environment, particularly through a fabrication with clean room class one or less. In order to allow an operator (18)...
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Format: | Patent |
Sprache: | eng ; fre ; ger |
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