Arrangement and method for manually moving a container for storing objects through an environment

It is described an arrangement (20) for manually moving a container (16) for storing objects, particularly for storing disklike objects such as wafers, flat panels or CDs, through an environment, particularly through a fabrication with clean room class one or less. In order to allow an operator (18)...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: MISSALE, REINER, HARIS, CLINTON, FRISA, LARRY EDWARD
Format: Patent
Sprache:eng ; fre ; ger
Schlagworte:
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