HIGH-SPEED PRECISION POSITIONING APPARATUS

A high-speed precision positioning apparatus has a stage supported by a platen. The stage is driven by a plurality of drive motors that are co-planar with the stage and arranged symmetrically around the stage. The drive motors apply drive forces directly to the stage without any mechanical contact t...

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Bibliographische Detailangaben
Hauptverfasser:	CAHILL, STEVEN, P, HUNTER, BRADLEY, L
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	ANALOGOUS ARRANGEMENTS USING OTHER WAVES BASIC ELECTRIC ELEMENTS CONSTRUCTIONAL DETAILS OF INSTRUMENTS, OR COMPARABLE DETAILSOF OTHER APPARATUS, NOT OTHERWISE PROVIDED FOR CONTROL OR REGULATING SYSTEMS IN GENERAL CONTROLLING CONVERSION OR DISTRIBUTION OF ELECTRIC POWER DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES DYNAMO-ELECTRIC MACHINES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY FUNCTIONAL ELEMENTS OF SUCH SYSTEMS GENERATION INSTRUMENT DETAILS LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION ORRERADIATION OF RADIO WAVES MEASURING MEASURING ANGLES MEASURING AREAS MEASURING IRREGULARITIES OF SURFACES OR CONTOURS MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS ORELEMENTS PHYSICS RADIO DIRECTION-FINDING RADIO NAVIGATION REGULATING SEMICONDUCTOR DEVICES SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES SYSTEMS FOR REGULATING ELECTRIC OR MAGNETIC VARIABLES TESTING
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