ACTIVE LARGE AREA AVALANCHE PHOTODIODE ARRAY
A large area avalanche photodiode device (300) that has a plurality of contacts (312) formed on a bottom side that are isolated from each other by various kinds of isolation structures. In one embodiment, a cavity (310) is formed in one layer of the avalanche photodiode that extends to a depletion r...
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Sprache: | eng ; fre ; ger |
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