ACTIVE LARGE AREA AVALANCHE PHOTODIODE ARRAY

A large area avalanche photodiode device (300) that has a plurality of contacts (312) formed on a bottom side that are isolated from each other by various kinds of isolation structures. In one embodiment, a cavity (310) is formed in one layer of the avalanche photodiode that extends to a depletion r...

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Bibliographische Detailangaben
Hauptverfasser: SIDOROV, ANATOLY I, DABROWSKI, ANDRZEJ, J, EREMIN, VLADIMIR K
Format: Patent
Sprache:eng ; fre ; ger
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