TREATING SUBSTRATES BY PRODUCING AND CONTROLLING A CRYOGENIC AEROSOL

A substrate may be treated by impinging the substrate with a cryogenic aerosol spray wherein the cryogenic aerosol spray is formed by expanding a pressurized liquid or liquid/gaseous stream of one or more cryogens through a nozzle at a given distance from the substrate into a process chamber with a...

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Bibliographische Detailangaben
Hauptverfasser: PATRIN, JOHN, C, HEITZINGER, JOHN, M
Format: Patent
Sprache:eng ; fre ; ger
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