TREATING SUBSTRATES BY PRODUCING AND CONTROLLING A CRYOGENIC AEROSOL
A substrate may be treated by impinging the substrate with a cryogenic aerosol spray wherein the cryogenic aerosol spray is formed by expanding a pressurized liquid or liquid/gaseous stream of one or more cryogens through a nozzle at a given distance from the substrate into a process chamber with a...
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Format: | Patent |
Sprache: | eng ; fre ; ger |
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