Ventilation structure of planarization chamber

A ventilation structure of a planarization chamber for ventilating the inside of a planarization chamber (1) housing a planarization apparatus(100)which prevents scratching of the workpiece by making the flow of air in the planarization chamber substantially laminar and thereby eliminating the risin...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	MATSUBARA, HISATO, HIRATA, KAZUHIKO
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	AIR-CONDITIONING, AIR-HUMIDIFICATION, VENTILATION, USE OF AIRCURRENTS FOR SCREENING BLASTING DRESSING OR CONDITIONING OF ABRADING SURFACES FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS GRINDING HEATING LIGHTING MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING MECHANICAL ENGINEERING PERFORMING OPERATIONS POLISHING RANGES TRANSPORTING VENTILATING WEAPONS
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!