MICROMECHANICAL BUILDING COMPONENT AND PRODUCTION PROCESS

Micromechanical component and a method for its production having vertically arranged layers made of metallic materials, with the layers adhering firmly to one another at least in part. The layers of the micromechanical component are attached to each other via intermediate layers, with the intermedia...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	MAGENAU, HORST, GLOCK, ARMIN, JAUERNIG, ALEXANDRA, SCHITTNY, THOMAS, KRAUSS, ELKE, SCHATZ, FRANK, GLAS, RONALD
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	APPARATUS THEREFOR BASIC ELECTRIC ELEMENTS CHEMISTRY ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRIC SWITCHES ELECTRICITY ELECTROFORMING ELECTROLYTIC OR ELECTROPHORETIC PROCESSES EMERGENCY PROTECTIVE DEVICES METALLURGY PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTIONOF COATINGS RELAYS SELECTORS SEMICONDUCTOR DEVICES
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