SEMICONDUCTOR DEVICE WITH MEMORY CAPACITOR AND METHOD OF MANUFACTURING SUCH A DEVICE

A semiconductor device with a semiconductor body (1) provided with a memory capacitor (12, 26) with a lower electrode (11, 23) consisting of a layer of semiconductor material (7, 23) having a rough surface (8, 24) formed by hemispherical grains (9, 25) of the relevant semiconductor material on which...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	DE BOER, WIEBE, BARTELD, MARTENS, MARIEKE, CORNELIA
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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