Method and materials for fabricating an ink-jet printhead

Method and materials for fabricating an ink-jet printhead

An ink-jet printhead fabrication technique enables capillary channels for liquid ink to be formed with square or rectangular cross-sections. A sacrificial layer (12) is placed over the main surface of a silicon chip (10), the sacrificial layer (12) being patterned in the form of the void formed by t...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: CALISTRI-YEH, MILDRED, BURKE, CATHIE J
Format: Patent
Sprache:eng ; fre ; ger
Schlagworte:
CORRECTION OF TYPOGRAPHICAL ERRORS
i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME
LINING MACHINES
PERFORMING OPERATIONS
PRINTING
SELECTIVE PRINTING MECHANISMS
STAMPS
TRANSPORTING
TYPEWRITERS
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Beschreibung
Zusammenfassung:An ink-jet printhead fabrication technique enables capillary channels for liquid ink to be formed with square or rectangular cross-sections. A sacrificial layer (12) is placed over the main surface of a silicon chip (10), the sacrificial layer (12) being patterned in the form of the void formed by the desired ink channels. A permanent layer (14), comprising a polybenzoxazole, is applied over the sacrificial layer. After polishing the two layers (12,14) to form a uniform surface, the sacrificial layer is removed.