Cathodic arc coater with an apparatus for driving the arc

An apparatus for applying material by cathodic arc vapor deposition to a substrate is provided which includes a vessel (14), apparatus (16) for maintaining a vacuum in the vessel, a disk-shaped cathode (18), apparatus (22) for selectively sustaining an arc of electrical energy between the cathode an...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	RAMALINGAM, SUBBIAH, BEERS, RUSSELL A, ROYAL, TYRUS E
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY
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