CHARACTERISATION OF OBJECTS BY MEANS OF ULTRASONIC WAVES

To characterize an object (3) to be measured, for example to gauge the thickness (d7) of a layer (7) borne by a substrate (4), an ultrasonic wave (8.1) is transmitted by a measuring device (1). Echo impulses (8.2, 8.5) reflected by boundary surfaces (5, 10) of the object (3) to be measured are detec...

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Hauptverfasser:	KREIER, PETER, KAELIN, AUGUST
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING MEASURING ANGLES MEASURING AREAS MEASURING IRREGULARITIES OF SURFACES OR CONTOURS MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS PHYSICS TESTING
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creator	KREIER, PETER KAELIN, AUGUST
description	To characterize an object (3) to be measured, for example to gauge the thickness (d7) of a layer (7) borne by a substrate (4), an ultrasonic wave (8.1) is transmitted by a measuring device (1). Echo impulses (8.2, 8.5) reflected by boundary surfaces (5, 10) of the object (3) to be measured are detected by the measuring device (1); the measuring signal is digitalised and subjected to an evolution analysis in the time domain. The evolution analysis uses an algorithm which is computation-efficient by orthogonalisation and implemented search strategy. The characteristics of the object to be measured, for example the thicknesses, are determined from the delay time differences of the echo waves (8.2, 3.5).
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language	eng ; fre ; ger
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subjects	INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING MEASURING ANGLES MEASURING AREAS MEASURING IRREGULARITIES OF SURFACES OR CONTOURS MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS PHYSICS TESTING
title	CHARACTERISATION OF OBJECTS BY MEANS OF ULTRASONIC WAVES
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