Single crystal growing apparatus ans single crystal growing method

The object of the present invention is to provide an apparatus and a method for preventing dropping of a single crystal having large diameter and heavy weight in a chamber with reduced pressure and for pulling it in reliable and safe manner. After a seed crystal 24a is immersed in Si melt in a quart...

Ausführliche Beschreibung

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Bibliographische Detailangaben
1. Verfasser: YAMAGISHI, HIROTOSHI
Format: Patent
Sprache:eng ; fre ; ger
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