Method of forming a contact structure

Method of forming a contact structure

A method of fabricating semiconductor structures, particularly contact structures, forms features of differing sizes at different points in the semiconductor process, so as to enhance lithographic resolution.

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Hauptverfasser: GRECO, STEPHEN EDWARD, WAGNER, TINA JANE, GRECO, NANCY ANNE
Format: Patent
Sprache:eng ; fre ; ger
Schlagworte:
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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creator GRECO, STEPHEN EDWARD
WAGNER, TINA JANE
GRECO, NANCY ANNE
description A method of fabricating semiconductor structures, particularly contact structures, forms features of differing sizes at different points in the semiconductor process, so as to enhance lithographic resolution.
format Patent
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language eng ; fre ; ger
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subjects BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
title Method of forming a contact structure
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