Monolithic integrated device of PIN diode and field effect transistor and method of manufacturing the same
A novel integrated arrangement of a PIN diode and a FET has (a) a HFET or MESFET as the FET; (b) a PIN diode formed of an undoped semiconductor layer with lateral P, I and N regions; and (c) a quasi-planar arrangement of the PIN diode and FET with the undoped semiconductor layer of the diode forming...
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Format: | Patent |
Sprache: | eng ; fre ; ger |
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