A METHOD OF MAKING A MULTILAYER THIN FILM STRUCTURE

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Hauptverfasser:	PITTLER, MARVIN, S, STEIMEL, HEINZ, OTTO, CHANG, KENNETH, FAROOQ, MUKTA, SHAJI, KUMAR, ANANDA, HOSAKERE, CZORNYJ, GEORGE
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	BASIC ELECTRIC ELEMENTS CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR ELECTRICITY MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS PRINTED CIRCUITS SEMICONDUCTOR DEVICES
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creator	PITTLER, MARVIN, S STEIMEL, HEINZ, OTTO CHANG, KENNETH FAROOQ, MUKTA, SHAJI KUMAR, ANANDA, HOSAKERE CZORNYJ, GEORGE
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fullrecord	<record><control><sourceid>epo_EVB</sourceid><recordid>TN_cdi_epo_espacenet_EP0557278B1</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>EP0557278B1</sourcerecordid><originalsourceid>FETCH-epo_espacenet_EP0557278B13</originalsourceid><addsrcrecordid>eNrjZDB2VPB1DfHwd1Hwd1PwdfT29HNXAAqF-oR4-jhGugYphHh4-im4efr4KgSHBIU6h4QGufIwsKYl5hSn8kJpbgYFN9cQZw_d1IL8-NTigsTk1LzUknjXAANTU3MjcwsnQ2MilAAAMmsmiw</addsrcrecordid><sourcetype>Open Access Repository</sourcetype><iscdi>true</iscdi><recordtype>patent</recordtype></control><display><type>patent</type><title>A METHOD OF MAKING A MULTILAYER THIN FILM STRUCTURE</title><source>esp@cenet</source><creator>PITTLER, MARVIN, S ; STEIMEL, HEINZ, OTTO ; CHANG, KENNETH ; FAROOQ, MUKTA, SHAJI ; KUMAR, ANANDA, HOSAKERE ; CZORNYJ, GEORGE</creator><creatorcontrib>PITTLER, MARVIN, S ; STEIMEL, HEINZ, OTTO ; CHANG, KENNETH ; FAROOQ, MUKTA, SHAJI ; KUMAR, ANANDA, HOSAKERE ; CZORNYJ, GEORGE</creatorcontrib><edition>5</edition><language>eng ; fre ; ger</language><subject>BASIC ELECTRIC ELEMENTS ; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS ; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ; ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR ; ELECTRICITY ; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS ; PRINTED CIRCUITS ; SEMICONDUCTOR DEVICES</subject><creationdate>1994</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=19941207&DB=EPODOC&CC=EP&NR=0557278B1$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,780,885,25564,76419</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=19941207&DB=EPODOC&CC=EP&NR=0557278B1$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>PITTLER, MARVIN, S</creatorcontrib><creatorcontrib>STEIMEL, HEINZ, OTTO</creatorcontrib><creatorcontrib>CHANG, KENNETH</creatorcontrib><creatorcontrib>FAROOQ, MUKTA, SHAJI</creatorcontrib><creatorcontrib>KUMAR, ANANDA, HOSAKERE</creatorcontrib><creatorcontrib>CZORNYJ, GEORGE</creatorcontrib><title>A METHOD OF MAKING A MULTILAYER THIN FILM STRUCTURE</title><subject>BASIC ELECTRIC ELEMENTS</subject><subject>CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS</subject><subject>ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR</subject><subject>ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR</subject><subject>ELECTRICITY</subject><subject>MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS</subject><subject>PRINTED CIRCUITS</subject><subject>SEMICONDUCTOR DEVICES</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>1994</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNrjZDB2VPB1DfHwd1Hwd1PwdfT29HNXAAqF-oR4-jhGugYphHh4-im4efr4KgSHBIU6h4QGufIwsKYl5hSn8kJpbgYFN9cQZw_d1IL8-NTigsTk1LzUknjXAANTU3MjcwsnQ2MilAAAMmsmiw</recordid><startdate>19941207</startdate><enddate>19941207</enddate><creator>PITTLER, MARVIN, S</creator><creator>STEIMEL, HEINZ, OTTO</creator><creator>CHANG, KENNETH</creator><creator>FAROOQ, MUKTA, SHAJI</creator><creator>KUMAR, ANANDA, HOSAKERE</creator><creator>CZORNYJ, GEORGE</creator><scope>EVB</scope></search><sort><creationdate>19941207</creationdate><title>A METHOD OF MAKING A MULTILAYER THIN FILM STRUCTURE</title><author>PITTLER, MARVIN, S ; STEIMEL, HEINZ, OTTO ; CHANG, KENNETH ; FAROOQ, MUKTA, SHAJI ; KUMAR, ANANDA, HOSAKERE ; CZORNYJ, GEORGE</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_EP0557278B13</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>eng ; fre ; ger</language><creationdate>1994</creationdate><topic>BASIC ELECTRIC ELEMENTS</topic><topic>CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS</topic><topic>ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR</topic><topic>ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR</topic><topic>ELECTRICITY</topic><topic>MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS</topic><topic>PRINTED CIRCUITS</topic><topic>SEMICONDUCTOR DEVICES</topic><toplevel>online_resources</toplevel><creatorcontrib>PITTLER, MARVIN, S</creatorcontrib><creatorcontrib>STEIMEL, HEINZ, OTTO</creatorcontrib><creatorcontrib>CHANG, KENNETH</creatorcontrib><creatorcontrib>FAROOQ, MUKTA, SHAJI</creatorcontrib><creatorcontrib>KUMAR, ANANDA, HOSAKERE</creatorcontrib><creatorcontrib>CZORNYJ, GEORGE</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>PITTLER, MARVIN, S</au><au>STEIMEL, HEINZ, OTTO</au><au>CHANG, KENNETH</au><au>FAROOQ, MUKTA, SHAJI</au><au>KUMAR, ANANDA, HOSAKERE</au><au>CZORNYJ, GEORGE</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>A METHOD OF MAKING A MULTILAYER THIN FILM STRUCTURE</title><date>1994-12-07</date><risdate>1994</risdate><edition>5</edition><oa>free_for_read</oa></addata></record>
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language	eng ; fre ; ger
recordid	cdi_epo_espacenet_EP0557278B1
source	esp@cenet
subjects	BASIC ELECTRIC ELEMENTS CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR ELECTRICITY MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS PRINTED CIRCUITS SEMICONDUCTOR DEVICES
title	A METHOD OF MAKING A MULTILAYER THIN FILM STRUCTURE
url	https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2025-01-08T00%3A31%3A55IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-epo_EVB&rft_val_fmt=info:ofi/fmt:kev:mtx:patent&rft.genre=patent&rft.au=PITTLER,%20MARVIN,%20S&rft.date=1994-12-07&rft_id=info:doi/&rft_dat=%3Cepo_EVB%3EEP0557278B1%3C/epo_EVB%3E%3Curl%3E%3C/url%3E&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_id=info:pmid/&rfr_iscdi=true