HIGH ACCURACY, HIGH FLEXIBILITY ENERGY BEAM MACHINING SYSTEM
A high precision system for machining substrates by means of an energy beam includes real time digital signal processor control and a deflection system providing control, within a predetermined field of the substrate, of the angle at which the beam machines the substrate. An electron beam is used in...
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| creator | RIZK, NABIL, AMIR BOOKE, MICHAEL, ABE YAU, YOU-WEN KALLMEYER, MICHAEL, HANS, WOLFGANG |
| description | A high precision system for machining substrates by means of an energy beam includes real time digital signal processor control and a deflection system providing control, within a predetermined field of the substrate, of the angle at which the beam machines the substrate. An electron beam is used in a vacuum chamber in a preferred embodiment. The system also includes an x-y table for positioning the substrate and may have provision for detecting the x-y position and angular misregistration of the substrate. Dynamic forms and stigmator control may be used to produce a uniform beam within the field. The system allows a high speed vector machining process, which optimizes the overall system throughput by minimizing the settling time of the deflection system. |
| format | Patent |
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An electron beam is used in a vacuum chamber in a preferred embodiment. The system also includes an x-y table for positioning the substrate and may have provision for detecting the x-y position and angular misregistration of the substrate. Dynamic forms and stigmator control may be used to produce a uniform beam within the field. The system allows a high speed vector machining process, which optimizes the overall system throughput by minimizing the settling time of the deflection system.</description><edition>6</edition><language>eng ; fre ; ger</language><subject>BASIC ELECTRIC ELEMENTS ; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS ; ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ; ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR ; ELECTRICITY ; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS ; PRINTED CIRCUITS</subject><creationdate>1996</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=19960320&DB=EPODOC&CC=EP&NR=0540514B1$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,776,881,25542,76290</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=19960320&DB=EPODOC&CC=EP&NR=0540514B1$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>RIZK, NABIL, AMIR</creatorcontrib><creatorcontrib>BOOKE, MICHAEL, ABE</creatorcontrib><creatorcontrib>YAU, YOU-WEN</creatorcontrib><creatorcontrib>KALLMEYER, MICHAEL, HANS, WOLFGANG</creatorcontrib><title>HIGH ACCURACY, HIGH FLEXIBILITY ENERGY BEAM MACHINING SYSTEM</title><description>A high precision system for machining substrates by means of an energy beam includes real time digital signal processor control and a deflection system providing control, within a predetermined field of the substrate, of the angle at which the beam machines the substrate. 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The system allows a high speed vector machining process, which optimizes the overall system throughput by minimizing the settling time of the deflection system.</description><subject>BASIC ELECTRIC ELEMENTS</subject><subject>CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS</subject><subject>ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS</subject><subject>ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR</subject><subject>ELECTRICITY</subject><subject>MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS</subject><subject>PRINTED CIRCUITS</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>1996</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNrjZLDx8HT3UHB0dg4NcnSO1FEAc918XCM8nTx9PEMiFVz9XIPcIxWcXB19FXwdnT08_Tz93BWCI4NDXH15GFjTEnOKU3mhNDeDgptriLOHbmpBfnxqcUFicmpeakm8a4CBqYmBqaGJk6ExEUoAkd0o4Q</recordid><startdate>19960320</startdate><enddate>19960320</enddate><creator>RIZK, NABIL, AMIR</creator><creator>BOOKE, MICHAEL, ABE</creator><creator>YAU, YOU-WEN</creator><creator>KALLMEYER, MICHAEL, HANS, WOLFGANG</creator><scope>EVB</scope></search><sort><creationdate>19960320</creationdate><title>HIGH ACCURACY, HIGH FLEXIBILITY ENERGY BEAM MACHINING SYSTEM</title><author>RIZK, NABIL, AMIR ; BOOKE, MICHAEL, ABE ; YAU, YOU-WEN ; KALLMEYER, MICHAEL, HANS, WOLFGANG</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_EP0540514B13</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>eng ; fre ; ger</language><creationdate>1996</creationdate><topic>BASIC ELECTRIC ELEMENTS</topic><topic>CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS</topic><topic>ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS</topic><topic>ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR</topic><topic>ELECTRICITY</topic><topic>MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS</topic><topic>PRINTED CIRCUITS</topic><toplevel>online_resources</toplevel><creatorcontrib>RIZK, NABIL, AMIR</creatorcontrib><creatorcontrib>BOOKE, MICHAEL, ABE</creatorcontrib><creatorcontrib>YAU, YOU-WEN</creatorcontrib><creatorcontrib>KALLMEYER, MICHAEL, HANS, WOLFGANG</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>RIZK, NABIL, AMIR</au><au>BOOKE, MICHAEL, ABE</au><au>YAU, YOU-WEN</au><au>KALLMEYER, MICHAEL, HANS, WOLFGANG</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>HIGH ACCURACY, HIGH FLEXIBILITY ENERGY BEAM MACHINING SYSTEM</title><date>1996-03-20</date><risdate>1996</risdate><abstract>A high precision system for machining substrates by means of an energy beam includes real time digital signal processor control and a deflection system providing control, within a predetermined field of the substrate, of the angle at which the beam machines the substrate. An electron beam is used in a vacuum chamber in a preferred embodiment. The system also includes an x-y table for positioning the substrate and may have provision for detecting the x-y position and angular misregistration of the substrate. Dynamic forms and stigmator control may be used to produce a uniform beam within the field. The system allows a high speed vector machining process, which optimizes the overall system throughput by minimizing the settling time of the deflection system.</abstract><edition>6</edition><oa>free_for_read</oa></addata></record> |
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| language | eng ; fre ; ger |
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| source | esp@cenet |
| subjects | BASIC ELECTRIC ELEMENTS CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR ELECTRICITY MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS PRINTED CIRCUITS |
| title | HIGH ACCURACY, HIGH FLEXIBILITY ENERGY BEAM MACHINING SYSTEM |
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