Apparatus for detecting extraneous substance on glass plate

An apparatus for detecting extraneous substances on a glass plate (1) comprises a first light projecting system (41) arranged above the glass plate surface under examination for irradiating the surface with an S-polarized laser beam at a first elevation angle, a second light projecting system (42) a...

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Hauptverfasser: HORAI, IZUO, KATO, NOBORU, KOIZUMI, MITSUYOSHI, KIMURA, TOSHIHIRO
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creator HORAI, IZUO
KATO, NOBORU
KOIZUMI, MITSUYOSHI
KIMURA, TOSHIHIRO
description An apparatus for detecting extraneous substances on a glass plate (1) comprises a first light projecting system (41) arranged above the glass plate surface under examination for irradiating the surface with an S-polarized laser beam at a first elevation angle, a second light projecting system (42) arranged above the surface for irradiating it with a P-polarized laser beam at a second elevation angle greater than the first elevation angle, and a light receiving system (5) for receiving light scattered from the surface at an elevation angle smaller than the first elevation angle. The light receiving system (5) is arranged on a side opposite to the direction of irradiation with a normal line set up at the beam irradiation point therebetween. The output level of the P-polarized beam is set in specific relation to the S-polarized beam.
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language eng ; fre ; ger
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subjects INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES
MEASURING
MEASURING ANGLES
MEASURING AREAS
MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS
PHYSICS
TESTING
title Apparatus for detecting extraneous substance on glass plate
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