Method of forming refractory metal free standing shapes

The invention relates to a method of forming a free standing shape made of a material containing refractory metal comprising the steps of providing a mandrel in a CVD enclosure, injecting a refractory metal halide gas and a reducing gas in said enclosure, reacting said gases in said enclosure to gen...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	JALBY, PIERRE, KIMURA, MASAO, ARAI, JUICHI, CLAVERIE, PIERRE, ROTMAN, FREDERIC, FRIEDT, JEAN-MARIE
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION
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