Interferometric sensor to measure distance-variations of a small surface

For the purpose of accurate measurement of small distance variations of a small measuring surface, there is arranged between the reference surface (17r) and measuring surface (15) in a Mirau-like interferometer arrangement a delay element (16v) which produces a difference in the path difference betw...

Ausführliche Beschreibung

Bibliographische Detailangaben

1. Verfasser:	MASSIG, JUERGEN HEINZ
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBEMICROSCOPY [SPM] ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVEREDIN A SINGLE OTHER SUBCLASS MEASURING MEASURING ANGLES MEASURING AREAS MEASURING IRREGULARITIES OF SURFACES OR CONTOURS MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS OPTICS PHYSICS SCANNING-PROBE TECHNIQUES OR APPARATUS TARIFF METERING APPARATUS TESTING
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