Integrated light waveguide manufacturing process

A transparent substrate is covered with a metal layer which serves as an etch mask for forming a groove, and from which regions are formed which constitute electrodes. At least the groove and the adjacent areas of the substrate are then covered with a layer of a material having electrooptical proper...

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Bibliographische Detailangaben
Hauptverfasser: HANISCH, HELMUT, KERSTEN, PETER
Format: Patent
Sprache:eng ; fre ; ger
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