THIN UNORIENTED LAYER OF MICROCRISTALLINE ALUMINIUM NITRIDE ON A SURFACE, AND METHOD FOR ITS PRODUCTION

The invention relates to a thin unoriented layer of microcrystalline aluminium nitride on a surface of a sheet-like article, and a method for its production by reactive DC (magnetron) sputtering.

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Bibliographische Detailangaben
Hauptverfasser:	HARTH, KLAUS, STEININGER, HELMUT, HIBST, HARTMUT, SONNBERGER, RALF, DR
Format:	Patent
Sprache:	eng ; ger
Schlagworte:	CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL COMPOUNDS THEREOF DIFFUSION TREATMENT OF METALLIC MATERIAL INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL INORGANIC CHEMISTRY METALLURGY NON-METALLIC ELEMENTS SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION
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Beschreibung
Zusammenfassung:	The invention relates to a thin unoriented layer of microcrystalline aluminium nitride on a surface of a sheet-like article, and a method for its production by reactive DC (magnetron) sputtering.