IC CHIPS WITH SELF-ALIGNED THIN FILM RESISTORS

Process of making an IC chip with thin film resistors, and IC chips made by such process, wherein a chip substrate first is covered with layers of thin film and interconnect material (with an intermediate barrier layer if needed), such layers being etched away in predetermined regions in accordance...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	RUGGERIO, PAUL, A, ANDERSON, CYNTHIA, E
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
Online-Zugang:	Volltext bestellen
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