OPTICAL MEASURING DEVICE

An optical measuring device for measuring the thickness or a height of a step of a workpiece (5) comprises a pair of deviation measuring means (16), a pulse generating circuit (17) for producing pulse signals which control the deviation measuring means (16) so that they operate alternately, and sign...

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Bibliographische Detailangaben
1. Verfasser: NAGAO, TOSHISHIGE
Format: Patent
Sprache:eng
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