DEVICES AND DEVICE FABRICATION WITH BOROSILICATE GLASS

Semiconductor devices are described which are made by a process involving the use of certain types of glass layers. These glass layers have high silica content, small amounts of boron oxide and optionally small amounts of aluminum oxide. The glass layers are put down by e-beam deposition procedure u...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: SINGH, SHOBHA, VAN UITERT, LEGRAND, GERARD, ZYDZIK, GEORGE JOHN, CHI, GOUUNG
Format: Patent
Sprache:eng
Schlagworte:
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