IMPROVED SILICON PACKAGES FOR POWER SEMICONDUCTOR DEVICES

A hermetically sealed package (24) for a power semiconductor wafer (22) is provided comprising substantially entirely silicon materials selected to have coefficients of thermal expansion closely matching that of the power semiconductor wafer. A semiconductor wafer (22) such as a power diode comprise...

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Bibliographische Detailangaben
Hauptverfasser: NEUGEBAUER, CONSTANTINE ALOIS, SELIM, FADEL ABDEL-AZIZ, GLASCOCK, HOMER HOPSON II, PICCONE, DANTE EDMOND, MUELLER, DAVID LEONARD, WEBSTER, HAROLD FRANK
Format: Patent
Sprache:eng
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