Method for processing a backside illuminated detector assembly
A process for fabricating high performance backside illuminated detectors (10) is described. The process uses a transmissive adhesive (12) such as epoxy on a transmissive substrate (10) to hold the detector material (14) during the fabrication process. After fabrication and connection to a readout d...
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Format: | Patent |
Sprache: | eng ; fre ; ger |
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