Mems-based capacitive sensor for use in a seismic acquisition system

Mems-based capacitive sensor for use in a seismic acquisition system

An apparatus includes a seismic acquisition system that includes an accelerometer. The accelerometer includes a capacitive MEMS-based sensor, a controller and a charge amplifier. The sensor includes a proof mass; input terminals to receive a first signal; and an output terminal that is electrically...

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1. Verfasser: PAULSON HANS
Format: Patent
Sprache:ara ; eng
Schlagworte:
DETECTING MASSES OR OBJECTS
GEOPHYSICS
GRAVITATIONAL MEASUREMENTS
MEASURING
PHYSICS
TESTING
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creator PAULSON HANS
description An apparatus includes a seismic acquisition system that includes an accelerometer. The accelerometer includes a capacitive MEMS-based sensor, a controller and a charge amplifier. The sensor includes a proof mass; input terminals to receive a first signal; and an output terminal that is electrically connected to the proof mass to provide a second signal. The first signal, which is regulated by the controller, controls an equilibrium restoring force for the sensor and causes the sensor to provide the second signal. The charge amplifier provides a third signal, which is indicative of a position of the proof mass. The charge amplifier has an input terminal to continuously receive the second signal during a time in which the first signal controls the equilibrium restoring force and causes the sensor to provide the second signal.
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language ara ; eng
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subjects DETECTING MASSES OR OBJECTS
GEOPHYSICS
GRAVITATIONAL MEASUREMENTS
MEASURING
PHYSICS
TESTING
title Mems-based capacitive sensor for use in a seismic acquisition system
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