FREMGANGSMÅDE TIL FREMSTILLING AF TERMOELEKTRISKE MIKROKØLERE

The present invention relates to thermoelectric apparatuses and can be used for the production of thermoelectric coolers applicable in radio electronics, medicine, and devices which are exploited, preferably, in the conditions of repeatable temperature cycling (heating-cooling). The method of production of a thermoelectric micro-cooler includes forming on a first ceramic wafer a first conductive layer containing conductive traces; soldering legs of thermoelectric material to the conductive traces of the first conductive layer: forming on a temporary wafer a second conductive layer containing conductive traces: soldering the conductive traces of the second conductive layer to the legs of thermoelectric material; applying to the legs of thermoelectric material and soldered joints a protective coating; etching the temporary wafer; applying onto the second ceramic wafer an elastic conductive adhesive layer; adhering the second ceramic wafer to the conductive traces of the second conductive layer. The technical effect is to facilitate the production and positioning of a conductive layer on legs of thermoelectric material and of improving the thermal cycling resistance of TEC by excluding the thermal impact on elastic heat-conducting adhesive.