Optisches Modul und seine Herstellungsmethode

Optisches Modul und seine Herstellungsmethode

An optical module, in which one or more grooves (105,115,125) on which a plurality of optical fibers (100) or optical parts (110) are mounted, are formed to different depths and one or more stopper holes (107,117) are manufactured so as to prevent a convex corner phenomenon so that an optical axis i...

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Hauptverfasser: KIM, YONG-SUNG, KIM, SANGAE, CHOI, HYUNG
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Sprache:ger
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OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
OPTICS
PHYSICS
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creator KIM, YONG-SUNG
KIM, SANGAE
CHOI, HYUNG
description An optical module, in which one or more grooves (105,115,125) on which a plurality of optical fibers (100) or optical parts (110) are mounted, are formed to different depths and one or more stopper holes (107,117) are manufactured so as to prevent a convex corner phenomenon so that an optical axis is precisely aligned, and a method for manufacturing the same are provided. The method for manufacturing an optical module includes the steps of first etching to form one or more grooves on a first surface of a wafer, and second etching to form one or more stopper holes so that a second surface of the wafer is etched to penetrate the wafer. The optical module having one or more grooves for mounting one or more optical parts on a substrate, includes stopper holes which are formed by penetrating the bottom surface of the substrate to center a region which corresponds to a predetermined region among the grooves.
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subjects OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
OPTICS
PHYSICS
title Optisches Modul und seine Herstellungsmethode
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