Benutzung einer Sonde in einer Teilchenstrahlvorrichtung
A positioner control device, communicatively coupled to a chamber of a charged particle beam device, CPBD, is configured to contact probes with contact points of a sample positioned in the chamber. A measurer communicatively coupled to the CPBD and the positioner may support measurement/detection of...
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| creator | HARTMAN, ADAM NELSON, JAY C FOLARON, ROBERT J FOSTER, PHILIP C BAUR, CHRISTOF STALLCUP, RICHARD E |
| description | A positioner control device, communicatively coupled to a chamber of a charged particle beam device, CPBD, is configured to contact probes with contact points of a sample positioned in the chamber. A measurer communicatively coupled to the CPBD and the positioner may support measurement/detection of a sample characteristic. A control routine may at least partially automate control of the CPBD, the positioner and measurer. One or more such components support methods which can include: directing first signals to probes positioned within the chamber, where at least one probe is exposed to a beam of the CPBD; comparing second signals to the first signals to determine a sample characteristic; and heating at least one of proximately-positioned probe tips such that one tip becomes sharpened as the heat dislodges portions thereof. |
| format | Patent |
| fullrecord | <record><control><sourceid>epo_EVB</sourceid><recordid>TN_cdi_epo_espacenet_DE602005002379TT2</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>DE602005002379TT2</sourcerecordid><originalsourceid>FETCH-epo_espacenet_DE602005002379TT23</originalsourceid><addsrcrecordid>eNrjZLBwSs0rLakqzUtXSM3MSy1SCM7PS0lVyMyDckNSM3OSM1LzikuKEjNyyvKLijKTM0qAynkYWNMSc4pTeaE0N4Oam2uIs4duakF-fGpxQWJyal5qSbyLq5mBkYGBqYGBkbG5ZUiIkTHRCgEcfzE8</addsrcrecordid><sourcetype>Open Access Repository</sourcetype><iscdi>true</iscdi><recordtype>patent</recordtype></control><display><type>patent</type><title>Benutzung einer Sonde in einer Teilchenstrahlvorrichtung</title><source>esp@cenet</source><creator>HARTMAN, ADAM ; NELSON, JAY C ; FOLARON, ROBERT J ; FOSTER, PHILIP C ; BAUR, CHRISTOF ; STALLCUP, RICHARD E</creator><creatorcontrib>HARTMAN, ADAM ; NELSON, JAY C ; FOLARON, ROBERT J ; FOSTER, PHILIP C ; BAUR, CHRISTOF ; STALLCUP, RICHARD E</creatorcontrib><description>A positioner control device, communicatively coupled to a chamber of a charged particle beam device, CPBD, is configured to contact probes with contact points of a sample positioned in the chamber. A measurer communicatively coupled to the CPBD and the positioner may support measurement/detection of a sample characteristic. A control routine may at least partially automate control of the CPBD, the positioner and measurer. One or more such components support methods which can include: directing first signals to probes positioned within the chamber, where at least one probe is exposed to a beam of the CPBD; comparing second signals to the first signals to determine a sample characteristic; and heating at least one of proximately-positioned probe tips such that one tip becomes sharpened as the heat dislodges portions thereof.</description><language>ger</language><subject>BASIC ELECTRIC ELEMENTS ; ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ; ELECTRICITY ; INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES ; MEASURING ; MEASURING ELECTRIC VARIABLES ; MEASURING MAGNETIC VARIABLES ; PHYSICS ; TESTING</subject><creationdate>2008</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20080612&DB=EPODOC&CC=DE&NR=602005002379T2$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,776,881,25542,76290</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20080612&DB=EPODOC&CC=DE&NR=602005002379T2$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>HARTMAN, ADAM</creatorcontrib><creatorcontrib>NELSON, JAY C</creatorcontrib><creatorcontrib>FOLARON, ROBERT J</creatorcontrib><creatorcontrib>FOSTER, PHILIP C</creatorcontrib><creatorcontrib>BAUR, CHRISTOF</creatorcontrib><creatorcontrib>STALLCUP, RICHARD E</creatorcontrib><title>Benutzung einer Sonde in einer Teilchenstrahlvorrichtung</title><description>A positioner control device, communicatively coupled to a chamber of a charged particle beam device, CPBD, is configured to contact probes with contact points of a sample positioned in the chamber. A measurer communicatively coupled to the CPBD and the positioner may support measurement/detection of a sample characteristic. A control routine may at least partially automate control of the CPBD, the positioner and measurer. One or more such components support methods which can include: directing first signals to probes positioned within the chamber, where at least one probe is exposed to a beam of the CPBD; comparing second signals to the first signals to determine a sample characteristic; and heating at least one of proximately-positioned probe tips such that one tip becomes sharpened as the heat dislodges portions thereof.</description><subject>BASIC ELECTRIC ELEMENTS</subject><subject>ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS</subject><subject>ELECTRICITY</subject><subject>INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES</subject><subject>MEASURING</subject><subject>MEASURING ELECTRIC VARIABLES</subject><subject>MEASURING MAGNETIC VARIABLES</subject><subject>PHYSICS</subject><subject>TESTING</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>2008</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNrjZLBwSs0rLakqzUtXSM3MSy1SCM7PS0lVyMyDckNSM3OSM1LzikuKEjNyyvKLijKTM0qAynkYWNMSc4pTeaE0N4Oam2uIs4duakF-fGpxQWJyal5qSbyLq5mBkYGBqYGBkbG5ZUiIkTHRCgEcfzE8</recordid><startdate>20080612</startdate><enddate>20080612</enddate><creator>HARTMAN, ADAM</creator><creator>NELSON, JAY C</creator><creator>FOLARON, ROBERT J</creator><creator>FOSTER, PHILIP C</creator><creator>BAUR, CHRISTOF</creator><creator>STALLCUP, RICHARD E</creator><scope>EVB</scope></search><sort><creationdate>20080612</creationdate><title>Benutzung einer Sonde in einer Teilchenstrahlvorrichtung</title><author>HARTMAN, ADAM ; NELSON, JAY C ; FOLARON, ROBERT J ; FOSTER, PHILIP C ; BAUR, CHRISTOF ; STALLCUP, RICHARD E</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_DE602005002379TT23</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>ger</language><creationdate>2008</creationdate><topic>BASIC ELECTRIC ELEMENTS</topic><topic>ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS</topic><topic>ELECTRICITY</topic><topic>INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES</topic><topic>MEASURING</topic><topic>MEASURING ELECTRIC VARIABLES</topic><topic>MEASURING MAGNETIC VARIABLES</topic><topic>PHYSICS</topic><topic>TESTING</topic><toplevel>online_resources</toplevel><creatorcontrib>HARTMAN, ADAM</creatorcontrib><creatorcontrib>NELSON, JAY C</creatorcontrib><creatorcontrib>FOLARON, ROBERT J</creatorcontrib><creatorcontrib>FOSTER, PHILIP C</creatorcontrib><creatorcontrib>BAUR, CHRISTOF</creatorcontrib><creatorcontrib>STALLCUP, RICHARD E</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>HARTMAN, ADAM</au><au>NELSON, JAY C</au><au>FOLARON, ROBERT J</au><au>FOSTER, PHILIP C</au><au>BAUR, CHRISTOF</au><au>STALLCUP, RICHARD E</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>Benutzung einer Sonde in einer Teilchenstrahlvorrichtung</title><date>2008-06-12</date><risdate>2008</risdate><abstract>A positioner control device, communicatively coupled to a chamber of a charged particle beam device, CPBD, is configured to contact probes with contact points of a sample positioned in the chamber. A measurer communicatively coupled to the CPBD and the positioner may support measurement/detection of a sample characteristic. A control routine may at least partially automate control of the CPBD, the positioner and measurer. One or more such components support methods which can include: directing first signals to probes positioned within the chamber, where at least one probe is exposed to a beam of the CPBD; comparing second signals to the first signals to determine a sample characteristic; and heating at least one of proximately-positioned probe tips such that one tip becomes sharpened as the heat dislodges portions thereof.</abstract><oa>free_for_read</oa></addata></record> |
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| subjects | BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING MEASURING ELECTRIC VARIABLES MEASURING MAGNETIC VARIABLES PHYSICS TESTING |
| title | Benutzung einer Sonde in einer Teilchenstrahlvorrichtung |
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