Process for the production of wear-resistant coatings of cubic boron nitride, and their use

The invention relates to a process for producing wear-resistant layers of cubic boron nitride or wear-resistant layers containing it by sputtering with r.f. or d.c. voltage in the operating mode as an unbalanced magnetron, in which the plasma is generated by d.c. arc discharges or d.c.-operated magn...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	LUETHJE, HOLGER., 25469 HALSTENBEK, DE, DAAUD, SIMONE., 23562 LUEBECK, DE, BEWILOGUA, KLAUS., 22844 NORDERSTEDT, DE
Format:	Patent
Sprache:	eng ; ger
Schlagworte:	CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION
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