Two=stage multilayer micro-valve - has central flexible tongue in first stage for direction of fluid into two chambers with outlet and return ports, respectively

A structured central wafer (30) e.g. of Si is sandwiched between upper and lower coatings (31, 32) which are shaped to enclose two parts (33, 34) of a chamber (35). Centred in the inlet port (22) is a flexible tongue (10) with a piezoelectric or thermally sensitive film (101) on its end facing the w...

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Bibliographische Detailangaben
Hauptverfasser:	METTNER, MICHAEL.., 7140 LUDWIGSBURG, DE, GRAUER, THOMAS. ER.NAT., 7000 STUTTGART, DE
Format:	Patent
Sprache:	eng ; ger
Schlagworte:	ACTUATING-FLOATS BLASTING COCKS DEVICES FOR VENTING OR AERATING ENGINEERING ELEMENTS AND UNITS FLUID-CIRCUIT ELEMENTS PREDOMINANTLY USED FOR COMPUTING ORCONTROL PURPOSES FLUID-PRESSURE ACTUATORS GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVEFUNCTIONING OF MACHINES OR INSTALLATIONS HEATING HYDRAULICS OR PNEUMATICS IN GENERAL LIGHTING MECHANICAL ENGINEERING TAPS THERMAL INSULATION IN GENERAL VALVES WEAPONS
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Beschreibung
Zusammenfassung:	A structured central wafer (30) e.g. of Si is sandwiched between upper and lower coatings (31, 32) which are shaped to enclose two parts (33, 34) of a chamber (35). Centred in the inlet port (22) is a flexible tongue (10) with a piezoelectric or thermally sensitive film (101) on its end facing the wedge-shaped tip (11) of the wafer (30). - The fluid is guided into either chamber (33 or 34) by deflection of the tongue (10). In the second stage (2) the wedge (11) prevents formation of vortices.