Haltevorrichtung für Substratscheiben
A device for releaseably holding a workpiece includes a resilient collet which is pivotally attached to a base. Several fingers for holding the workpiece extend from the collet. The fingers are pivoted by actuating a member which elastically deforms the collet and causes the fingers to pivot from a...
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| creator | HOLT, CARL JAMES JR., NEWBURYPORT, MASSACHUSETTS 01959, US BRICK, ROBERT V., GLOUCESTER MASSACHUSETTS 01930, US MEARS, ERIC L., ROCKPORT MASSACHUSETTS, US HERTEL, RICHARD J., BRADFORD MASSACHUSETTS 01830, US |
| description | A device for releaseably holding a workpiece includes a resilient collet which is pivotally attached to a base. Several fingers for holding the workpiece extend from the collet. The fingers are pivoted by actuating a member which elastically deforms the collet and causes the fingers to pivot from a position for engaging the workpiece to a position for releasing the workpiece and vice-versa. In one application, the base is a platen for supporting a wafer in a semiconductor processing system and a plurality of such platens and a corresponding plurality of the holding devices are arranged around the periphery of the disk. A counterweight ring is attached to the ring-shaped collet to counter-balance the moment generated by the centrifugal force of the wafer pressing against the fingers as the disk is rotated. |
| format | Patent |
| fullrecord | <record><control><sourceid>epo_EVB</sourceid><recordid>TN_cdi_epo_espacenet_DE3855424TT2</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>DE3855424TT2</sourcerecordid><originalsourceid>FETCH-epo_espacenet_DE3855424TT23</originalsourceid><addsrcrecordid>eNrjZFDzSMwpSS3LLyrKTM4oKc1LV0g7vKdIIbg0qbikKLGkODkjNTMpNY-HgTUtMac4lRdKczMourmGOHvophbkx6cWFyQmp-allsS7uBpbmJqaGJmEhBgZE6MGAAqXKUY</addsrcrecordid><sourcetype>Open Access Repository</sourcetype><iscdi>true</iscdi><recordtype>patent</recordtype></control><display><type>patent</type><title>Haltevorrichtung für Substratscheiben</title><source>esp@cenet</source><creator>HOLT, CARL JAMES JR., NEWBURYPORT, MASSACHUSETTS 01959, US ; BRICK, ROBERT V., GLOUCESTER MASSACHUSETTS 01930, US ; MEARS, ERIC L., ROCKPORT MASSACHUSETTS, US ; HERTEL, RICHARD J., BRADFORD MASSACHUSETTS 01830, US</creator><creatorcontrib>HOLT, CARL JAMES JR., NEWBURYPORT, MASSACHUSETTS 01959, US ; BRICK, ROBERT V., GLOUCESTER MASSACHUSETTS 01930, US ; MEARS, ERIC L., ROCKPORT MASSACHUSETTS, US ; HERTEL, RICHARD J., BRADFORD MASSACHUSETTS 01830, US</creatorcontrib><description>A device for releaseably holding a workpiece includes a resilient collet which is pivotally attached to a base. Several fingers for holding the workpiece extend from the collet. The fingers are pivoted by actuating a member which elastically deforms the collet and causes the fingers to pivot from a position for engaging the workpiece to a position for releasing the workpiece and vice-versa. In one application, the base is a platen for supporting a wafer in a semiconductor processing system and a plurality of such platens and a corresponding plurality of the holding devices are arranged around the periphery of the disk. A counterweight ring is attached to the ring-shaped collet to counter-balance the moment generated by the centrifugal force of the wafer pressing against the fingers as the disk is rotated.</description><edition>6</edition><language>ger</language><subject>BASIC ELECTRIC ELEMENTS ; ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ; ELECTRICITY ; SEMICONDUCTOR DEVICES</subject><creationdate>1996</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=19961121&DB=EPODOC&CC=DE&NR=3855424T2$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,780,885,25564,76547</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=19961121&DB=EPODOC&CC=DE&NR=3855424T2$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>HOLT, CARL JAMES JR., NEWBURYPORT, MASSACHUSETTS 01959, US</creatorcontrib><creatorcontrib>BRICK, ROBERT V., GLOUCESTER MASSACHUSETTS 01930, US</creatorcontrib><creatorcontrib>MEARS, ERIC L., ROCKPORT MASSACHUSETTS, US</creatorcontrib><creatorcontrib>HERTEL, RICHARD J., BRADFORD MASSACHUSETTS 01830, US</creatorcontrib><title>Haltevorrichtung für Substratscheiben</title><description>A device for releaseably holding a workpiece includes a resilient collet which is pivotally attached to a base. Several fingers for holding the workpiece extend from the collet. The fingers are pivoted by actuating a member which elastically deforms the collet and causes the fingers to pivot from a position for engaging the workpiece to a position for releasing the workpiece and vice-versa. In one application, the base is a platen for supporting a wafer in a semiconductor processing system and a plurality of such platens and a corresponding plurality of the holding devices are arranged around the periphery of the disk. A counterweight ring is attached to the ring-shaped collet to counter-balance the moment generated by the centrifugal force of the wafer pressing against the fingers as the disk is rotated.</description><subject>BASIC ELECTRIC ELEMENTS</subject><subject>ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS</subject><subject>ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR</subject><subject>ELECTRICITY</subject><subject>SEMICONDUCTOR DEVICES</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>1996</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNrjZFDzSMwpSS3LLyrKTM4oKc1LV0g7vKdIIbg0qbikKLGkODkjNTMpNY-HgTUtMac4lRdKczMourmGOHvophbkx6cWFyQmp-allsS7uBpbmJqaGJmEhBgZE6MGAAqXKUY</recordid><startdate>19961121</startdate><enddate>19961121</enddate><creator>HOLT, CARL JAMES JR., NEWBURYPORT, MASSACHUSETTS 01959, US</creator><creator>BRICK, ROBERT V., GLOUCESTER MASSACHUSETTS 01930, US</creator><creator>MEARS, ERIC L., ROCKPORT MASSACHUSETTS, US</creator><creator>HERTEL, RICHARD J., BRADFORD MASSACHUSETTS 01830, US</creator><scope>EVB</scope></search><sort><creationdate>19961121</creationdate><title>Haltevorrichtung für Substratscheiben</title><author>HOLT, CARL JAMES JR., NEWBURYPORT, MASSACHUSETTS 01959, US ; BRICK, ROBERT V., GLOUCESTER MASSACHUSETTS 01930, US ; MEARS, ERIC L., ROCKPORT MASSACHUSETTS, US ; HERTEL, RICHARD J., BRADFORD MASSACHUSETTS 01830, US</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_DE3855424TT23</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>ger</language><creationdate>1996</creationdate><topic>BASIC ELECTRIC ELEMENTS</topic><topic>ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS</topic><topic>ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR</topic><topic>ELECTRICITY</topic><topic>SEMICONDUCTOR DEVICES</topic><toplevel>online_resources</toplevel><creatorcontrib>HOLT, CARL JAMES JR., NEWBURYPORT, MASSACHUSETTS 01959, US</creatorcontrib><creatorcontrib>BRICK, ROBERT V., GLOUCESTER MASSACHUSETTS 01930, US</creatorcontrib><creatorcontrib>MEARS, ERIC L., ROCKPORT MASSACHUSETTS, US</creatorcontrib><creatorcontrib>HERTEL, RICHARD J., BRADFORD MASSACHUSETTS 01830, US</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>HOLT, CARL JAMES JR., NEWBURYPORT, MASSACHUSETTS 01959, US</au><au>BRICK, ROBERT V., GLOUCESTER MASSACHUSETTS 01930, US</au><au>MEARS, ERIC L., ROCKPORT MASSACHUSETTS, US</au><au>HERTEL, RICHARD J., BRADFORD MASSACHUSETTS 01830, US</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>Haltevorrichtung für Substratscheiben</title><date>1996-11-21</date><risdate>1996</risdate><abstract>A device for releaseably holding a workpiece includes a resilient collet which is pivotally attached to a base. Several fingers for holding the workpiece extend from the collet. The fingers are pivoted by actuating a member which elastically deforms the collet and causes the fingers to pivot from a position for engaging the workpiece to a position for releasing the workpiece and vice-versa. In one application, the base is a platen for supporting a wafer in a semiconductor processing system and a plurality of such platens and a corresponding plurality of the holding devices are arranged around the periphery of the disk. A counterweight ring is attached to the ring-shaped collet to counter-balance the moment generated by the centrifugal force of the wafer pressing against the fingers as the disk is rotated.</abstract><edition>6</edition><oa>free_for_read</oa></addata></record> |
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| subjects | BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES |
| title | Haltevorrichtung für Substratscheiben |
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