Synchrotron-Strahlungsquelle

An industrial compact synchrotron radiation source with improved vacuum to prolong life-time of a charged particle beam. The synchrotron supplies highly stable, intense synchrotron radiation. In the source, a charged particle beam bending duct (1) forming a vacuum chamber through which the charged particle beam circulates, is encompassed by a bending electromagnet (2). At least one SR guide duct (3) for guiding the radiation to the outside extends from the outer circumferential wall (1e) of the bending duct. The SR guide duct is connected through a gate valve (5) to an SR beam line duct (7) for guiding the SR beam to an object to be worked on. A vacuum pump (4) is disposed on the side of the gate valve, close to an orbit (A) of the charged particle beam. The SR guide duct extending from the outer circumferential wall of the bending duct takes the form of a divergent duct which is widened in accordance with a spreading angle ( theta s) of the SR beam travelling through the SR guide duct.