Rapid-closure straight-way (straight-through) valve of a vacuum protective system

In the case of a rapid-closure straight-way valve for beam-guiding systems on particle accelerators, a vertically displaceable diaphragm (9) which has a preferably slot-shaped opening and is driven by a solenoid (8) controlled by means of a pressure sensor (2) is arranged in the high-vacuum region o...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: KAESELAU,SVEN, ROHRMOSER,WERNER, BETZ,HANS,DR
Format: Patent
Sprache:eng ; ger
Schlagworte:
Online-Zugang:Volltext bestellen
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!