Direkte Abscheidung von Palladium
The present invention is directed to a process for forming a layer of palladium on a substrate, comprising: preparing a solution of a palladium precursor, wherein the palladium precursor consists ofPd(OOCR1)m(OOCR2)nwherein R1 is hydrogen, alkyl, alkenyl, alkynyl, -R3COOH, alkyl from 1 to 5 carbons...
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| creator | NARANG, SUBHASH C SHARMA, SUNITY KUMAR NIGAM, ASUTOSH BHASIN, KULDIP KUMAR |
| description | The present invention is directed to a process for forming a layer of palladium on a substrate, comprising: preparing a solution of a palladium precursor, wherein the palladium precursor consists ofPd(OOCR1)m(OOCR2)nwherein R1 is hydrogen, alkyl, alkenyl, alkynyl, -R3COOH, alkyl from 1 to 5 carbons substituted with one or two hydroxyl groups, R2 is hydrogen, alkyl, alkenyl, alkynyl, -R3COOH, alkyl from 1 to 5 carbon atoms substituted with one or two hydroxyl groups, -CHO, R3 is alkyl, and alkyl groups from 1 to 5 carbon atoms substituted with one or two hydroxyl groups m and n are real numbers or fractions, and m+n=2; applying the palladium precursor to the surface of the substrate; decomposing the palladium precursor by subjecting the precursor to heat. |
| format | Patent |
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applying the palladium precursor to the surface of the substrate; decomposing the palladium precursor by subjecting the precursor to heat.</abstract><oa>free_for_read</oa></addata></record> |
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| subjects | CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR ELECTRICITY INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS METALLURGY PRINTED CIRCUITS SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION |
| title | Direkte Abscheidung von Palladium |
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