Optical parameter measuring device e.g. for optical layer absolute thickness and refractive index measurement

The measuring device has a light source (1,2) providing a coherent light beam (6) of given wavelength and beam diameter, fed to an angle spectrum device (3), providing an angle spectrum beam directed onto the optical layer (4), with detection of the reflected and/or transmitted light and evaluation...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	KOCH, ALEXANDER W, RUPRECHT, MICHAEL
Format:	Patent
Sprache:	eng ; ger
Schlagworte:	INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING MEASURING ANGLES MEASURING AREAS MEASURING IRREGULARITIES OF SURFACES OR CONTOURS MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS PHYSICS TESTING
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!