Verfahren und Vorrichtung zur Plasmabehandlung von Werkstücken

Verfahren zur Plasmabehandlung von Werkstücken, bei dem das Werkstück in eine zumindest teilweise evakuierbare Kammer einer Behandlungsstation eingesetzt wird und bei dem das Werkstück innerhalb der Behandlungsstation von einem Halteelement positioniert wird, wobei das Werkstück (5) durch mindestens...

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Hauptverfasser:	Müller, Hartwig, Bicker, Matthias, Dr, Lewin, Frank, Klein, Jürgen, Dr, Arnold, Gregor, Litzenberg, Michael, Lüttringhaus-Henkel, Andreas, Vogel, Klaus, Behle, Stephan, Dr
Format:	Patent
Sprache:	ger
Schlagworte:	ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F,C08G AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TO SURFACES, IN GENERAL CHEMICAL ASPECTS OF BANDAGES, DRESSINGS, ABSORBENT PADS, ORSURGICAL ARTICLES CHEMICAL COMPOSITION OF GLASSES, GLAZES, OR VITREOUSENAMELS CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOIDCHEMISTRY CHEMICAL SURFACE TREATMENT CHEMISTRY CLEANING CLEANING IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL COMPOSITIONS BASED THEREON CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS,e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES,DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS CONVEYING DIFFUSION TREATMENT OF METALLIC MATERIAL DISINFECTION, STERILISATION, OR DEODORISATION OF AIR GENERAL PROCESSES OF COMPOUNDING GLASS HANDLING THIN OR FILAMENTARY MATERIAL HUMAN NECESSITIES HYGIENE INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL JOINING GLASS TO GLASS OR OTHER MATERIALS MATERIALS FOR BANDAGES, DRESSINGS, ABSORBENT PADS, OR SURGICALARTICLES MEDICAL OR VETERINARY SCIENCE METALLURGY METHODS OR APPARATUS FOR STERILISING MATERIALS OR OBJECTS INGENERAL MINERAL OR SLAG WOOL ORGANIC MACROMOLECULAR COMPOUNDS PACKAGES PACKAGING ELEMENTS PACKING PERFORMING OPERATIONS PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL PNEUMATIC TUBE CONVEYORS PREVENTION OF FOULING IN GENERAL PROCESSES FOR APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TOSURFACES, IN GENERAL SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDEDFOR SHAPING OR JOINING OF PLASTICS SHOP CONVEYOR SYSTEMS SPRAYING OR ATOMISING IN GENERAL STORING SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS,MINERALS OR SLAGS SURFACE TREATMENT OF GLASS SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION THEIR PREPARATION OR CHEMICAL WORKING-UP THEIR RELEVANT APPARATUS TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING ORTIPPING TRANSPORTING WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL WORKING-UP
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creator	Müller, Hartwig Bicker, Matthias, Dr Lewin, Frank Klein, Jürgen, Dr Arnold, Gregor Litzenberg, Michael Lüttringhaus-Henkel, Andreas Vogel, Klaus Behle, Stephan, Dr
description	Verfahren zur Plasmabehandlung von Werkstücken, bei dem das Werkstück in eine zumindest teilweise evakuierbare Kammer einer Behandlungsstation eingesetzt wird und bei dem das Werkstück innerhalb der Behandlungsstation von einem Halteelement positioniert wird, wobei das Werkstück (5) durch mindestens zwei relativ zueinander positionierbare Klemmelemente des Halteelementes (46) in Form von verschwenkbar gelagerten Haltearmen (47, 48) derart beaufschlagt wird, dass das Werkstück (5) von einem Klemmraum (54) zwischen den Klemmelementen aufgenommen wird, dadurch gekennzeichnet, dass Arretierungselemente (59, 60) gemeinsam mit einer Kammerwandung (18) zur Fixierung der Haltearme (47, 48) positioniert werden.
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Jürgen, Dr ; Arnold, Gregor ; Litzenberg, Michael ; Lüttringhaus-Henkel, Andreas ; Vogel, Klaus ; Behle, Stephan, Dr</creatorcontrib><description>Verfahren zur Plasmabehandlung von Werkstücken, bei dem das Werkstück in eine zumindest teilweise evakuierbare Kammer einer Behandlungsstation eingesetzt wird und bei dem das Werkstück innerhalb der Behandlungsstation von einem Halteelement positioniert wird, wobei das Werkstück (5) durch mindestens zwei relativ zueinander positionierbare Klemmelemente des Halteelementes (46) in Form von verschwenkbar gelagerten Haltearmen (47, 48) derart beaufschlagt wird, dass das Werkstück (5) von einem Klemmraum (54) zwischen den Klemmelementen aufgenommen wird, dadurch gekennzeichnet, dass Arretierungselemente (59, 60) gemeinsam mit einer Kammerwandung (18) zur Fixierung der Haltearme (47, 48) positioniert werden.</description><language>ger</language><subject>ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR ; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F,C08G ; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING ; APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TO SURFACES, IN GENERAL ; CHEMICAL ASPECTS OF BANDAGES, DRESSINGS, ABSORBENT PADS, ORSURGICAL ARTICLES ; CHEMICAL COMPOSITION OF GLASSES, GLAZES, OR VITREOUSENAMELS ; CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOIDCHEMISTRY ; CHEMICAL SURFACE TREATMENT ; CHEMISTRY ; CLEANING ; CLEANING IN GENERAL ; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL ; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL ; COATING MATERIAL WITH METALLIC MATERIAL ; COATING METALLIC MATERIAL ; COMPOSITIONS BASED THEREON ; CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS,e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES,DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS ; CONVEYING ; DIFFUSION TREATMENT OF METALLIC MATERIAL ; DISINFECTION, STERILISATION, OR DEODORISATION OF AIR ; GENERAL PROCESSES OF COMPOUNDING ; GLASS ; HANDLING THIN OR FILAMENTARY MATERIAL ; HUMAN NECESSITIES ; HYGIENE ; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL ; JOINING GLASS TO GLASS OR OTHER MATERIALS ; MATERIALS FOR BANDAGES, DRESSINGS, ABSORBENT PADS, OR SURGICALARTICLES ; MEDICAL OR VETERINARY SCIENCE ; METALLURGY ; METHODS OR APPARATUS FOR STERILISING MATERIALS OR OBJECTS INGENERAL ; MINERAL OR SLAG WOOL ; ORGANIC MACROMOLECULAR COMPOUNDS ; PACKAGES ; PACKAGING ELEMENTS ; PACKING ; PERFORMING OPERATIONS ; PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL ; PNEUMATIC TUBE CONVEYORS ; PREVENTION OF FOULING IN GENERAL ; PROCESSES FOR APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TOSURFACES, IN GENERAL ; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDEDFOR ; SHAPING OR JOINING OF PLASTICS ; SHOP CONVEYOR SYSTEMS ; SPRAYING OR ATOMISING IN GENERAL ; STORING ; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS,MINERALS OR SLAGS ; SURFACE TREATMENT OF GLASS ; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION ; THEIR PREPARATION OR CHEMICAL WORKING-UP ; THEIR RELEVANT APPARATUS ; TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING ORTIPPING ; TRANSPORTING ; WORKING OF PLASTICS ; WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL ; 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Gregor</creatorcontrib><creatorcontrib>Litzenberg, Michael</creatorcontrib><creatorcontrib>Lüttringhaus-Henkel, Andreas</creatorcontrib><creatorcontrib>Vogel, Klaus</creatorcontrib><creatorcontrib>Behle, Stephan, Dr</creatorcontrib><title>Verfahren und Vorrichtung zur Plasmabehandlung von Werkstücken</title><description>Verfahren zur Plasmabehandlung von Werkstücken, bei dem das Werkstück in eine zumindest teilweise evakuierbare Kammer einer Behandlungsstation eingesetzt wird und bei dem das Werkstück innerhalb der Behandlungsstation von einem Halteelement positioniert wird, wobei das Werkstück (5) durch mindestens zwei relativ zueinander positionierbare Klemmelemente des Halteelementes (46) in Form von verschwenkbar gelagerten Haltearmen (47, 48) derart beaufschlagt wird, dass das Werkstück (5) von einem Klemmraum (54) zwischen den Klemmelementen aufgenommen wird, dadurch gekennzeichnet, dass Arretierungselemente (59, 60) gemeinsam mit einer Kammerwandung (18) zur Fixierung der Haltearme (47, 48) positioniert werden.</description><subject>ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR</subject><subject>AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F,C08G</subject><subject>AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING</subject><subject>APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TO SURFACES, IN GENERAL</subject><subject>CHEMICAL ASPECTS OF BANDAGES, DRESSINGS, ABSORBENT PADS, ORSURGICAL ARTICLES</subject><subject>CHEMICAL COMPOSITION OF GLASSES, GLAZES, OR VITREOUSENAMELS</subject><subject>CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOIDCHEMISTRY</subject><subject>CHEMICAL SURFACE TREATMENT</subject><subject>CHEMISTRY</subject><subject>CLEANING</subject><subject>CLEANING IN GENERAL</subject><subject>COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL</subject><subject>COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL</subject><subject>COATING MATERIAL WITH METALLIC MATERIAL</subject><subject>COATING METALLIC MATERIAL</subject><subject>COMPOSITIONS BASED THEREON</subject><subject>CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS,e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES,DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS</subject><subject>CONVEYING</subject><subject>DIFFUSION TREATMENT OF METALLIC MATERIAL</subject><subject>DISINFECTION, STERILISATION, OR DEODORISATION OF AIR</subject><subject>GENERAL PROCESSES OF COMPOUNDING</subject><subject>GLASS</subject><subject>HANDLING THIN OR FILAMENTARY MATERIAL</subject><subject>HUMAN NECESSITIES</subject><subject>HYGIENE</subject><subject>INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL</subject><subject>JOINING GLASS TO GLASS OR OTHER MATERIALS</subject><subject>MATERIALS FOR BANDAGES, DRESSINGS, ABSORBENT PADS, OR SURGICALARTICLES</subject><subject>MEDICAL OR VETERINARY SCIENCE</subject><subject>METALLURGY</subject><subject>METHODS OR APPARATUS FOR STERILISING MATERIALS OR OBJECTS INGENERAL</subject><subject>MINERAL OR SLAG WOOL</subject><subject>ORGANIC MACROMOLECULAR COMPOUNDS</subject><subject>PACKAGES</subject><subject>PACKAGING ELEMENTS</subject><subject>PACKING</subject><subject>PERFORMING OPERATIONS</subject><subject>PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL</subject><subject>PNEUMATIC TUBE CONVEYORS</subject><subject>PREVENTION OF FOULING IN GENERAL</subject><subject>PROCESSES FOR APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TOSURFACES, IN GENERAL</subject><subject>SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDEDFOR</subject><subject>SHAPING OR JOINING OF PLASTICS</subject><subject>SHOP CONVEYOR SYSTEMS</subject><subject>SPRAYING OR ATOMISING IN GENERAL</subject><subject>STORING</subject><subject>SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS,MINERALS OR SLAGS</subject><subject>SURFACE TREATMENT OF GLASS</subject><subject>SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION</subject><subject>THEIR PREPARATION OR CHEMICAL WORKING-UP</subject><subject>THEIR RELEVANT APPARATUS</subject><subject>TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING ORTIPPING</subject><subject>TRANSPORTING</subject><subject>WORKING OF PLASTICS</subject><subject>WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL</subject><subject>WORKING-UP</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>2020</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNrjZLAPSy1KS8woSs1TKM1LUQjLLyrKTM4oKc1LV6gqLVIIyEkszk1MSs1IzEvJAQmW5ecphKcWZReXHN6TnJ2ax8PAmpaYU5zKC6W5GRTdXEOcPXRTC_LjU4sLEpNT81JL4l1cDQ2MjExMTcydTIyJUQMAEnkyHw</recordid><startdate>20200625</startdate><enddate>20200625</enddate><creator>Müller, Hartwig</creator><creator>Bicker, Matthias, Dr</creator><creator>Lewin, Frank</creator><creator>Klein, 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OTHER FLUENT MATERIALS TO SURFACES, IN GENERAL</topic><topic>CHEMICAL ASPECTS OF BANDAGES, DRESSINGS, ABSORBENT PADS, ORSURGICAL ARTICLES</topic><topic>CHEMICAL COMPOSITION OF GLASSES, GLAZES, OR VITREOUSENAMELS</topic><topic>CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOIDCHEMISTRY</topic><topic>CHEMICAL SURFACE TREATMENT</topic><topic>CHEMISTRY</topic><topic>CLEANING</topic><topic>CLEANING IN GENERAL</topic><topic>COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL</topic><topic>COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL</topic><topic>COATING MATERIAL WITH METALLIC MATERIAL</topic><topic>COATING METALLIC MATERIAL</topic><topic>COMPOSITIONS BASED THEREON</topic><topic>CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS,e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES,DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS</topic><topic>CONVEYING</topic><topic>DIFFUSION TREATMENT OF METALLIC MATERIAL</topic><topic>DISINFECTION, STERILISATION, OR DEODORISATION OF AIR</topic><topic>GENERAL PROCESSES OF COMPOUNDING</topic><topic>GLASS</topic><topic>HANDLING THIN OR FILAMENTARY MATERIAL</topic><topic>HUMAN NECESSITIES</topic><topic>HYGIENE</topic><topic>INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL</topic><topic>JOINING GLASS TO GLASS OR OTHER MATERIALS</topic><topic>MATERIALS FOR BANDAGES, DRESSINGS, ABSORBENT PADS, OR SURGICALARTICLES</topic><topic>MEDICAL OR VETERINARY SCIENCE</topic><topic>METALLURGY</topic><topic>METHODS OR APPARATUS FOR STERILISING MATERIALS OR OBJECTS INGENERAL</topic><topic>MINERAL OR SLAG WOOL</topic><topic>ORGANIC MACROMOLECULAR COMPOUNDS</topic><topic>PACKAGES</topic><topic>PACKAGING ELEMENTS</topic><topic>PACKING</topic><topic>PERFORMING OPERATIONS</topic><topic>PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL</topic><topic>PNEUMATIC TUBE CONVEYORS</topic><topic>PREVENTION OF FOULING IN GENERAL</topic><topic>PROCESSES FOR APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TOSURFACES, IN GENERAL</topic><topic>SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDEDFOR</topic><topic>SHAPING OR JOINING OF PLASTICS</topic><topic>SHOP CONVEYOR SYSTEMS</topic><topic>SPRAYING OR ATOMISING IN GENERAL</topic><topic>STORING</topic><topic>SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS,MINERALS OR SLAGS</topic><topic>SURFACE TREATMENT OF GLASS</topic><topic>SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION</topic><topic>THEIR PREPARATION OR CHEMICAL WORKING-UP</topic><topic>THEIR RELEVANT APPARATUS</topic><topic>TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING ORTIPPING</topic><topic>TRANSPORTING</topic><topic>WORKING OF PLASTICS</topic><topic>WORKING OF SUBSTANCES IN A PLASTIC STATE, IN 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subjects	ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F,C08G AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TO SURFACES, IN GENERAL CHEMICAL ASPECTS OF BANDAGES, DRESSINGS, ABSORBENT PADS, ORSURGICAL ARTICLES CHEMICAL COMPOSITION OF GLASSES, GLAZES, OR VITREOUSENAMELS CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOIDCHEMISTRY CHEMICAL SURFACE TREATMENT CHEMISTRY CLEANING CLEANING IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL COMPOSITIONS BASED THEREON CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS,e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES,DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS CONVEYING DIFFUSION TREATMENT OF METALLIC MATERIAL DISINFECTION, STERILISATION, OR DEODORISATION OF AIR GENERAL PROCESSES OF COMPOUNDING GLASS HANDLING THIN OR FILAMENTARY MATERIAL HUMAN NECESSITIES HYGIENE INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL JOINING GLASS TO GLASS OR OTHER MATERIALS MATERIALS FOR BANDAGES, DRESSINGS, ABSORBENT PADS, OR SURGICALARTICLES MEDICAL OR VETERINARY SCIENCE METALLURGY METHODS OR APPARATUS FOR STERILISING MATERIALS OR OBJECTS INGENERAL MINERAL OR SLAG WOOL ORGANIC MACROMOLECULAR COMPOUNDS PACKAGES PACKAGING ELEMENTS PACKING PERFORMING OPERATIONS PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL PNEUMATIC TUBE CONVEYORS PREVENTION OF FOULING IN GENERAL PROCESSES FOR APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TOSURFACES, IN GENERAL SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDEDFOR SHAPING OR JOINING OF PLASTICS SHOP CONVEYOR SYSTEMS SPRAYING OR ATOMISING IN GENERAL STORING SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS,MINERALS OR SLAGS SURFACE TREATMENT OF GLASS SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION THEIR PREPARATION OR CHEMICAL WORKING-UP THEIR RELEVANT APPARATUS TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING ORTIPPING TRANSPORTING WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL WORKING-UP
title	Verfahren und Vorrichtung zur Plasmabehandlung von Werkstücken
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