Interferometrisches Messverfahren und Vorrichtung

Method in which frequency modulated light is generated and directed at a surface to be measured and a reference surface. The resultant light is combined to form an interference pattern that is measured by a photo-detector. Object surface distances are measured using the phase of the photo-detector s...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	DRABAREK, PAWEL, STREIBL, NORBERT
Format:	Patent
Sprache:	ger
Schlagworte:	MEASURING MEASURING ANGLES MEASURING AREAS MEASURING IRREGULARITIES OF SURFACES OR CONTOURS MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS PHYSICS TESTING
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