Media connection socket, useful in sputtering coating device for simultaneous transmission of electricity and coolant, comprises a coolant line comprising terminal ends with differing bending stiffnesses, and a current conductor element
The media connection socket comprises a coolant line (1, 2) that comprises two opposite terminal ends, has differing bending stiffness at the two terminal ends and is electrically conductive at the terminal ends, and an electrically conductive current conductor element (3) electrically connected wit...
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description | The media connection socket comprises a coolant line (1, 2) that comprises two opposite terminal ends, has differing bending stiffness at the two terminal ends and is electrically conductive at the terminal ends, and an electrically conductive current conductor element (3) electrically connected with the coolant line at the terminal ends. The current conductor element is a metallic strand, and encloses the coolant line. A portion of the coolant line is a bellows-shaped pipe section having a relatively low bending stiffness and small wall thickness. One terminal end comprises a screw thread. Independent claims are included for: (1) a sputtering coating device; and (2) a vacuum coating plant.
Der Erfindung liegt die Aufgabe zugrunde, eine funktionssichere und flexible gleichzeitige Übertragung von Strom und Zuführung von Kühlwasser zu einer Sputterbeschichtungseinrichtung unter Vermeidung des schädlichen Entstehens eines elektrochemischen Elements zu gewährleisten, und zwar sowohl als Reparaturlösung als auch für neu zu fertigende Magnetrons. Hierzu wird ein Medienanschlussstutzen zur gleichzeitigen Übertragung von Strom und Kühlmittel vorgeschlagen, der eine Kühlmittelleitung mit zwei gegenüberliegenden Anschlussenden umfasst, wobei die Kühlmittelleitung zumindest zwei Abschnitte unterschiedlicher Biegesteifigkeit aufweist und zumindest im Bereich der Anschlussenden elektrisch leitend ist, sowie mindestens ein elektrisch leitendes Stromleiterelement umfasst, welches unabhängig von der Kühlmittelleitung mit den beiden Anschlüssen elektrisch verbunden ist. |
format | Patent |
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Der Erfindung liegt die Aufgabe zugrunde, eine funktionssichere und flexible gleichzeitige Übertragung von Strom und Zuführung von Kühlwasser zu einer Sputterbeschichtungseinrichtung unter Vermeidung des schädlichen Entstehens eines elektrochemischen Elements zu gewährleisten, und zwar sowohl als Reparaturlösung als auch für neu zu fertigende Magnetrons. Hierzu wird ein Medienanschlussstutzen zur gleichzeitigen Übertragung von Strom und Kühlmittel vorgeschlagen, der eine Kühlmittelleitung mit zwei gegenüberliegenden Anschlussenden umfasst, wobei die Kühlmittelleitung zumindest zwei Abschnitte unterschiedlicher Biegesteifigkeit aufweist und zumindest im Bereich der Anschlussenden elektrisch leitend ist, sowie mindestens ein elektrisch leitendes Stromleiterelement umfasst, welches unabhängig von der Kühlmittelleitung mit den beiden Anschlüssen elektrisch verbunden ist.</description><language>eng ; ger</language><subject>BASIC ELECTRIC ELEMENTS ; CHEMICAL SURFACE TREATMENT ; CHEMISTRY ; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL ; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL ; COATING MATERIAL WITH METALLIC MATERIAL ; COATING METALLIC MATERIAL ; DIFFUSION TREATMENT OF METALLIC MATERIAL ; ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ; ELECTRICITY ; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL ; METALLURGY ; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION</subject><creationdate>2013</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20130307&DB=EPODOC&CC=DE&NR=102011111779A1$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,778,883,25547,76298</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20130307&DB=EPODOC&CC=DE&NR=102011111779A1$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>GROSER, GOETZ</creatorcontrib><creatorcontrib>HUEBNER, ARMIN</creatorcontrib><title>Media connection socket, useful in sputtering coating device for simultaneous transmission of electricity and coolant, comprises a coolant line comprising terminal ends with differing bending stiffnesses, and a current conductor element</title><description>The media connection socket comprises a coolant line (1, 2) that comprises two opposite terminal ends, has differing bending stiffness at the two terminal ends and is electrically conductive at the terminal ends, and an electrically conductive current conductor element (3) electrically connected with the coolant line at the terminal ends. The current conductor element is a metallic strand, and encloses the coolant line. A portion of the coolant line is a bellows-shaped pipe section having a relatively low bending stiffness and small wall thickness. One terminal end comprises a screw thread. Independent claims are included for: (1) a sputtering coating device; and (2) a vacuum coating plant.
Der Erfindung liegt die Aufgabe zugrunde, eine funktionssichere und flexible gleichzeitige Übertragung von Strom und Zuführung von Kühlwasser zu einer Sputterbeschichtungseinrichtung unter Vermeidung des schädlichen Entstehens eines elektrochemischen Elements zu gewährleisten, und zwar sowohl als Reparaturlösung als auch für neu zu fertigende Magnetrons. Hierzu wird ein Medienanschlussstutzen zur gleichzeitigen Übertragung von Strom und Kühlmittel vorgeschlagen, der eine Kühlmittelleitung mit zwei gegenüberliegenden Anschlussenden umfasst, wobei die Kühlmittelleitung zumindest zwei Abschnitte unterschiedlicher Biegesteifigkeit aufweist und zumindest im Bereich der Anschlussenden elektrisch leitend ist, sowie mindestens ein elektrisch leitendes Stromleiterelement umfasst, welches unabhängig von der Kühlmittelleitung mit den beiden Anschlüssen elektrisch verbunden ist.</description><subject>BASIC ELECTRIC ELEMENTS</subject><subject>CHEMICAL SURFACE TREATMENT</subject><subject>CHEMISTRY</subject><subject>COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL</subject><subject>COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL</subject><subject>COATING MATERIAL WITH METALLIC MATERIAL</subject><subject>COATING METALLIC MATERIAL</subject><subject>DIFFUSION TREATMENT OF METALLIC MATERIAL</subject><subject>ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS</subject><subject>ELECTRICITY</subject><subject>INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL</subject><subject>METALLURGY</subject><subject>SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>2013</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNqNj7FOQzEMRd_CgIB_8MJWpD4YKkbUFrGwsVcmccAicZ5iB8Q_8xE4QHe8XOnGPvfmdPp6pMgIoYpQMK4CWsMb2Qq6UuoZ2J2lm1FjefE9tKGR3jkQpNpAufRsKFS7gjUULaw6SDUBZac2DmyfgBL9vmYUp4dalsZKCng0IbPQ8WGEeGZhwQwkUeGD7RUip_Tb5NnNoWpuCamjVj8RzuutkfP8U7EH845eo7hzPp0kzEoXf3o2Xd7vn7YPV7TUA-mCgYTssNvP6-v1PGazub2bb_679w0_ZXS_</recordid><startdate>20130307</startdate><enddate>20130307</enddate><creator>GROSER, GOETZ</creator><creator>HUEBNER, ARMIN</creator><scope>EVB</scope></search><sort><creationdate>20130307</creationdate><title>Media connection socket, useful in sputtering coating device for simultaneous transmission of electricity and coolant, comprises a coolant line comprising terminal ends with differing bending stiffnesses, and a current conductor element</title><author>GROSER, GOETZ ; HUEBNER, ARMIN</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_DE102011111779A13</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>eng ; ger</language><creationdate>2013</creationdate><topic>BASIC ELECTRIC ELEMENTS</topic><topic>CHEMICAL SURFACE TREATMENT</topic><topic>CHEMISTRY</topic><topic>COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL</topic><topic>COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL</topic><topic>COATING MATERIAL WITH METALLIC MATERIAL</topic><topic>COATING METALLIC MATERIAL</topic><topic>DIFFUSION TREATMENT OF METALLIC MATERIAL</topic><topic>ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS</topic><topic>ELECTRICITY</topic><topic>INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL</topic><topic>METALLURGY</topic><topic>SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION</topic><toplevel>online_resources</toplevel><creatorcontrib>GROSER, GOETZ</creatorcontrib><creatorcontrib>HUEBNER, ARMIN</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>GROSER, GOETZ</au><au>HUEBNER, ARMIN</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>Media connection socket, useful in sputtering coating device for simultaneous transmission of electricity and coolant, comprises a coolant line comprising terminal ends with differing bending stiffnesses, and a current conductor element</title><date>2013-03-07</date><risdate>2013</risdate><abstract>The media connection socket comprises a coolant line (1, 2) that comprises two opposite terminal ends, has differing bending stiffness at the two terminal ends and is electrically conductive at the terminal ends, and an electrically conductive current conductor element (3) electrically connected with the coolant line at the terminal ends. The current conductor element is a metallic strand, and encloses the coolant line. A portion of the coolant line is a bellows-shaped pipe section having a relatively low bending stiffness and small wall thickness. One terminal end comprises a screw thread. Independent claims are included for: (1) a sputtering coating device; and (2) a vacuum coating plant.
Der Erfindung liegt die Aufgabe zugrunde, eine funktionssichere und flexible gleichzeitige Übertragung von Strom und Zuführung von Kühlwasser zu einer Sputterbeschichtungseinrichtung unter Vermeidung des schädlichen Entstehens eines elektrochemischen Elements zu gewährleisten, und zwar sowohl als Reparaturlösung als auch für neu zu fertigende Magnetrons. Hierzu wird ein Medienanschlussstutzen zur gleichzeitigen Übertragung von Strom und Kühlmittel vorgeschlagen, der eine Kühlmittelleitung mit zwei gegenüberliegenden Anschlussenden umfasst, wobei die Kühlmittelleitung zumindest zwei Abschnitte unterschiedlicher Biegesteifigkeit aufweist und zumindest im Bereich der Anschlussenden elektrisch leitend ist, sowie mindestens ein elektrisch leitendes Stromleiterelement umfasst, welches unabhängig von der Kühlmittelleitung mit den beiden Anschlüssen elektrisch verbunden ist.</abstract><oa>free_for_read</oa></addata></record> |
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subjects | BASIC ELECTRIC ELEMENTS CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION |
title | Media connection socket, useful in sputtering coating device for simultaneous transmission of electricity and coolant, comprises a coolant line comprising terminal ends with differing bending stiffnesses, and a current conductor element |
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