Determination of at least an optical property of a substrate, especially inhomogeneity of material refractive index, using interferometer measurement system with a mirror that is laterally displaced between measurements
Method for determining at least an optical property of a substrate, especially inhomogeneity of the material refractive index, whereby a mirror (25) is laterally displaced in the interval between two measurements. The measured optical property is subsequently considered when an optical element is ma...
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| creator | KUEBLER, WOLFGANG GOEDECKE, UWE |
| description | Method for determining at least an optical property of a substrate, especially inhomogeneity of the material refractive index, whereby a mirror (25) is laterally displaced in the interval between two measurements. The measured optical property is subsequently considered when an optical element is manufactured from the substrate.
Ein Verfahren zum Ermitteln wenigstens einer optischen Eigenschaft, insbesondere von Inhomogenitäten eines Brechungsindex eines Materials eines Substrates (37), wird ähnlich einem Verfahren nach J. Schwider et al. durchgeführt, wobei allerdings ein Spiegel (25) zur Reflexion eines Meßstrahls (17) zwischen zwei interferometrischen Messungen lateral verlagert wird. Die ermittelte optische Eigenschaft des Substrates wird bei einer Herstellung eines optischen Elements aus dem Substrat berücksichtigt. |
| format | Patent |
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Ein Verfahren zum Ermitteln wenigstens einer optischen Eigenschaft, insbesondere von Inhomogenitäten eines Brechungsindex eines Materials eines Substrates (37), wird ähnlich einem Verfahren nach J. Schwider et al. durchgeführt, wobei allerdings ein Spiegel (25) zur Reflexion eines Meßstrahls (17) zwischen zwei interferometrischen Messungen lateral verlagert wird. Die ermittelte optische Eigenschaft des Substrates wird bei einer Herstellung eines optischen Elements aus dem Substrat berücksichtigt.</description><edition>7</edition><language>eng ; ger</language><subject>INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES ; MEASURING ; PHYSICS ; TESTING</subject><creationdate>2005</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20050414&DB=EPODOC&CC=DE&NR=102004057442A1$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,780,885,25564,76419</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20050414&DB=EPODOC&CC=DE&NR=102004057442A1$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>KUEBLER, WOLFGANG</creatorcontrib><creatorcontrib>GOEDECKE, UWE</creatorcontrib><title>Determination of at least an optical property of a substrate, especially inhomogeneity of material refractive index, using interferometer measurement system with a mirror that is laterally displaced between measurements</title><description>Method for determining at least an optical property of a substrate, especially inhomogeneity of the material refractive index, whereby a mirror (25) is laterally displaced in the interval between two measurements. The measured optical property is subsequently considered when an optical element is manufactured from the substrate.
Ein Verfahren zum Ermitteln wenigstens einer optischen Eigenschaft, insbesondere von Inhomogenitäten eines Brechungsindex eines Materials eines Substrates (37), wird ähnlich einem Verfahren nach J. Schwider et al. durchgeführt, wobei allerdings ein Spiegel (25) zur Reflexion eines Meßstrahls (17) zwischen zwei interferometrischen Messungen lateral verlagert wird. Die ermittelte optische Eigenschaft des Substrates wird bei einer Herstellung eines optischen Elements aus dem Substrat berücksichtigt.</description><subject>INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES</subject><subject>MEASURING</subject><subject>PHYSICS</subject><subject>TESTING</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>2005</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNqNjj1OA1EMhLehQMAd3NAFaRMSUSMSxAHoo5fd2ayl9yfbS9izchmcQEFJZY3m88xcN19bGCRxDsYlUxkoGEUENQouq3EXIlUpFWLzxSedDmoSDAuCVnQcYpyJ81hSOSKDf8DkhLhHgkFCZ_wBh3p8LmhSzkcXDgyQks4bKHnrJEjIRjqrIdGJbfTCxCJFyEbfxkrxHHzp7FlrDB16OsBOQP4borfN1RCi4u733jT3r7v3l7cH1LL35f6YYfvtbtmu2nbdbp7W69Xz8vG_3Df2WW6f</recordid><startdate>20050414</startdate><enddate>20050414</enddate><creator>KUEBLER, WOLFGANG</creator><creator>GOEDECKE, UWE</creator><scope>EVB</scope></search><sort><creationdate>20050414</creationdate><title>Determination of at least an optical property of a substrate, especially inhomogeneity of material refractive index, using interferometer measurement system with a mirror that is laterally displaced between measurements</title><author>KUEBLER, WOLFGANG ; GOEDECKE, UWE</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_DE102004057442A13</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>eng ; ger</language><creationdate>2005</creationdate><topic>INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES</topic><topic>MEASURING</topic><topic>PHYSICS</topic><topic>TESTING</topic><toplevel>online_resources</toplevel><creatorcontrib>KUEBLER, WOLFGANG</creatorcontrib><creatorcontrib>GOEDECKE, UWE</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>KUEBLER, WOLFGANG</au><au>GOEDECKE, UWE</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>Determination of at least an optical property of a substrate, especially inhomogeneity of material refractive index, using interferometer measurement system with a mirror that is laterally displaced between measurements</title><date>2005-04-14</date><risdate>2005</risdate><abstract>Method for determining at least an optical property of a substrate, especially inhomogeneity of the material refractive index, whereby a mirror (25) is laterally displaced in the interval between two measurements. The measured optical property is subsequently considered when an optical element is manufactured from the substrate.
Ein Verfahren zum Ermitteln wenigstens einer optischen Eigenschaft, insbesondere von Inhomogenitäten eines Brechungsindex eines Materials eines Substrates (37), wird ähnlich einem Verfahren nach J. Schwider et al. durchgeführt, wobei allerdings ein Spiegel (25) zur Reflexion eines Meßstrahls (17) zwischen zwei interferometrischen Messungen lateral verlagert wird. Die ermittelte optische Eigenschaft des Substrates wird bei einer Herstellung eines optischen Elements aus dem Substrat berücksichtigt.</abstract><edition>7</edition><oa>free_for_read</oa></addata></record> |
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| subjects | INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING PHYSICS TESTING |
| title | Determination of at least an optical property of a substrate, especially inhomogeneity of material refractive index, using interferometer measurement system with a mirror that is laterally displaced between measurements |
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