Method for treating of surfaces and materials by microwave plasma entails producing microwave-excited plasma microwave-conducting waveguide and adapting field construction of plasma movement to defined run length

The method is for the treating of surfaces and materials by means of microwave plasma, whereby a microwave-excited plasma is produced in a microwave-conducting waveguide at a predetermined location, the plasma is caused to move, the field construction of the plasma movement is adapted to a defined r...

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Hauptverfasser: KROHMANN, UDO, NEUMANN, TORSTEN
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creator KROHMANN, UDO
NEUMANN, TORSTEN
description The method is for the treating of surfaces and materials by means of microwave plasma, whereby a microwave-excited plasma is produced in a microwave-conducting waveguide at a predetermined location, the plasma is caused to move, the field construction of the plasma movement is adapted to a defined run length, and the surface and materials to be treated are located in the field of influence of the plasma. An independent claim is included for a device for carrying out the proposed method including a microwave generator (1), a microwaveguide structure (3), an igniter (4) for the plasma (6), and a device (8) for the adapting of the field construction to the movement of the plasma.
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subjects AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F,C08G
BASIC ELECTRIC ELEMENTS
CHEMICAL ASPECTS OF BANDAGES, DRESSINGS, ABSORBENT PADS, ORSURGICAL ARTICLES
CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOIDCHEMISTRY
CHEMISTRY
COMPOSITIONS BASED THEREON
DISINFECTION, STERILISATION, OR DEODORISATION OF AIR
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
GENERAL PROCESSES OF COMPOUNDING
HUMAN NECESSITIES
HYGIENE
MATERIALS FOR BANDAGES, DRESSINGS, ABSORBENT PADS, OR SURGICALARTICLES
MEDICAL OR VETERINARY SCIENCE
METALLURGY
METHODS OR APPARATUS FOR STERILISING MATERIALS OR OBJECTS INGENERAL
ORGANIC MACROMOLECULAR COMPOUNDS
PERFORMING OPERATIONS
PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
PLASMA TECHNIQUE
PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OFNEUTRONS
PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMICBEAMS
THEIR PREPARATION OR CHEMICAL WORKING-UP
THEIR RELEVANT APPARATUS
TRANSPORTING
WORKING-UP
title Method for treating of surfaces and materials by microwave plasma entails producing microwave-excited plasma microwave-conducting waveguide and adapting field construction of plasma movement to defined run length
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