Method for treating of surfaces and materials by microwave plasma entails producing microwave-excited plasma microwave-conducting waveguide and adapting field construction of plasma movement to defined run length

The method is for the treating of surfaces and materials by means of microwave plasma, whereby a microwave-excited plasma is produced in a microwave-conducting waveguide at a predetermined location, the plasma is caused to move, the field construction of the plasma movement is adapted to a defined r...

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Hauptverfasser: KROHMANN, UDO, NEUMANN, TORSTEN
Format: Patent
Sprache:eng ; ger
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Zusammenfassung:The method is for the treating of surfaces and materials by means of microwave plasma, whereby a microwave-excited plasma is produced in a microwave-conducting waveguide at a predetermined location, the plasma is caused to move, the field construction of the plasma movement is adapted to a defined run length, and the surface and materials to be treated are located in the field of influence of the plasma. An independent claim is included for a device for carrying out the proposed method including a microwave generator (1), a microwaveguide structure (3), an igniter (4) for the plasma (6), and a device (8) for the adapting of the field construction to the movement of the plasma.