Mikromechanischer kapazitiver Beschleunigungssensor

Mikromechanischer kapazitiver Beschleunigungssensor

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Hauptverfasser: PRECHTEL, ULRICH, KNITTL, PETER, KAPSER, KONRAD, SEIDEL, HELMUT, WEINACHT, MANFRED, TOELG, SEBASTIAN
Format: Patent
Sprache:ger
Schlagworte:
INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
MEASURING
MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION,OR SHOCK
MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES
MICROSTRUCTURAL TECHNOLOGY
PERFORMING OPERATIONS
PHYSICS
TESTING
TRANSPORTING
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creator PRECHTEL, ULRICH
KNITTL, PETER
KAPSER, KONRAD
SEIDEL, HELMUT
WEINACHT, MANFRED
TOELG, SEBASTIAN
description
format Patent
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subjects INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
MEASURING
MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION,OR SHOCK
MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES
MICROSTRUCTURAL TECHNOLOGY
PERFORMING OPERATIONS
PHYSICS
TESTING
TRANSPORTING
title Mikromechanischer kapazitiver Beschleunigungssensor
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