Micromechanical component used as an acceleration or rotation sensor in vehicles has functional components hanging above a substrate in a functional layer
Micromechanical component has functional components hanging above a substrate (10) in a functional layer (12). Opposite lying surfaces of the functional components are partially covered with a conducting foil. An Independent claim is also included for a process for the production of a micromechanica...
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| creator | RUDHARD, JOACHIM LAERMER, FRANZ RUMP, ARNOLD PINTER, STEFAN FISCHER, FRANK |
| description | Micromechanical component has functional components hanging above a substrate (10) in a functional layer (12). Opposite lying surfaces of the functional components are partially covered with a conducting foil. An Independent claim is also included for a process for the production of a micromechanical component. Preferred Features: The conducting foil is a metal foil, especially made from aluminum, an alloy based on AlSi and AlSiCu, nickel or a NiSi alloy. The opposite lying surfaces of the functional components are vertical walls of trenches. The substrate is a silicon substrate with a sacrificial layer (11) on. The functional layer is polysilicon.
Die Erfindung schafft ein mikromechanisches Bauelement, insbesondere einen Beschleunigungs- oder Drehratensensor, mit oberhalb eines Substrates (10) beweglich aufgehängten Funktionskomponenten (12), wobei gegenüberliegende Flächen der Funktionskomponenten (12) aufeinander zu beweglich sind. Die gegenüberliegenden Flächen der Funktionskomponenten (12) sind zumindest teilweise mit einem leitfähigen Film (60) überzogen. |
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Die Erfindung schafft ein mikromechanisches Bauelement, insbesondere einen Beschleunigungs- oder Drehratensensor, mit oberhalb eines Substrates (10) beweglich aufgehängten Funktionskomponenten (12), wobei gegenüberliegende Flächen der Funktionskomponenten (12) aufeinander zu beweglich sind. Die gegenüberliegenden Flächen der Funktionskomponenten (12) sind zumindest teilweise mit einem leitfähigen Film (60) überzogen.</description><edition>7</edition><language>eng ; ger</language><subject>BASIC ELECTRIC ELEMENTS ; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ; ELECTRICITY ; GYROSCOPIC INSTRUMENTS ; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT ; MEASURING ; MEASURING DISTANCES, LEVELS OR BEARINGS ; MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION,OR SHOCK ; MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES ; MICROSTRUCTURAL TECHNOLOGY ; NAVIGATION ; PERFORMING OPERATIONS ; PHOTOGRAMMETRY OR VIDEOGRAMMETRY ; PHYSICS ; PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTUREOR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS ; SEMICONDUCTOR DEVICES ; SURVEYING ; TESTING ; TRANSPORTING</subject><creationdate>2002</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20020418&DB=EPODOC&CC=DE&NR=10051315A1$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,780,885,25555,76308</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20020418&DB=EPODOC&CC=DE&NR=10051315A1$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>RUDHARD, JOACHIM</creatorcontrib><creatorcontrib>LAERMER, FRANZ</creatorcontrib><creatorcontrib>RUMP, ARNOLD</creatorcontrib><creatorcontrib>PINTER, STEFAN</creatorcontrib><creatorcontrib>FISCHER, FRANK</creatorcontrib><title>Micromechanical component used as an acceleration or rotation sensor in vehicles has functional components hanging above a substrate in a functional layer</title><description>Micromechanical component has functional components hanging above a substrate (10) in a functional layer (12). Opposite lying surfaces of the functional components are partially covered with a conducting foil. An Independent claim is also included for a process for the production of a micromechanical component. Preferred Features: The conducting foil is a metal foil, especially made from aluminum, an alloy based on AlSi and AlSiCu, nickel or a NiSi alloy. The opposite lying surfaces of the functional components are vertical walls of trenches. The substrate is a silicon substrate with a sacrificial layer (11) on. The functional layer is polysilicon.
Die Erfindung schafft ein mikromechanisches Bauelement, insbesondere einen Beschleunigungs- oder Drehratensensor, mit oberhalb eines Substrates (10) beweglich aufgehängten Funktionskomponenten (12), wobei gegenüberliegende Flächen der Funktionskomponenten (12) aufeinander zu beweglich sind. Die gegenüberliegenden Flächen der Funktionskomponenten (12) sind zumindest teilweise mit einem leitfähigen Film (60) überzogen.</description><subject>BASIC ELECTRIC ELEMENTS</subject><subject>ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR</subject><subject>ELECTRICITY</subject><subject>GYROSCOPIC INSTRUMENTS</subject><subject>INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT</subject><subject>MEASURING</subject><subject>MEASURING DISTANCES, LEVELS OR BEARINGS</subject><subject>MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION,OR SHOCK</subject><subject>MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES</subject><subject>MICROSTRUCTURAL TECHNOLOGY</subject><subject>NAVIGATION</subject><subject>PERFORMING OPERATIONS</subject><subject>PHOTOGRAMMETRY OR VIDEOGRAMMETRY</subject><subject>PHYSICS</subject><subject>PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTUREOR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS</subject><subject>SEMICONDUCTOR DEVICES</subject><subject>SURVEYING</subject><subject>TESTING</subject><subject>TRANSPORTING</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>2002</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNqNjDEOglAQRGksjHqH9QAmEMIBjGJs7OzJsi7yk88u-fsh8SqeVogWlFYzk5k36-R9cxS0Y2pRHKEH0q5XYYkwGD8ADVAAidhzwOhUQAMEjV9vLDZlJzBy68izQTshzSA098u_uZGnkydgrSMDgg21xemUZx6XkMcXh22yatAb7366SfaX8n66HrjXiq1HYuFYncssTYssz4pjlv-z-QCBilN8</recordid><startdate>20020418</startdate><enddate>20020418</enddate><creator>RUDHARD, JOACHIM</creator><creator>LAERMER, FRANZ</creator><creator>RUMP, ARNOLD</creator><creator>PINTER, STEFAN</creator><creator>FISCHER, FRANK</creator><scope>EVB</scope></search><sort><creationdate>20020418</creationdate><title>Micromechanical component used as an acceleration or rotation sensor in vehicles has functional components hanging above a substrate in a functional layer</title><author>RUDHARD, JOACHIM ; LAERMER, FRANZ ; RUMP, ARNOLD ; PINTER, STEFAN ; FISCHER, FRANK</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_DE10051315A13</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>eng ; ger</language><creationdate>2002</creationdate><topic>BASIC ELECTRIC ELEMENTS</topic><topic>ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR</topic><topic>ELECTRICITY</topic><topic>GYROSCOPIC INSTRUMENTS</topic><topic>INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT</topic><topic>MEASURING</topic><topic>MEASURING DISTANCES, LEVELS OR BEARINGS</topic><topic>MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION,OR SHOCK</topic><topic>MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES</topic><topic>MICROSTRUCTURAL TECHNOLOGY</topic><topic>NAVIGATION</topic><topic>PERFORMING OPERATIONS</topic><topic>PHOTOGRAMMETRY OR VIDEOGRAMMETRY</topic><topic>PHYSICS</topic><topic>PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTUREOR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS</topic><topic>SEMICONDUCTOR DEVICES</topic><topic>SURVEYING</topic><topic>TESTING</topic><topic>TRANSPORTING</topic><toplevel>online_resources</toplevel><creatorcontrib>RUDHARD, JOACHIM</creatorcontrib><creatorcontrib>LAERMER, FRANZ</creatorcontrib><creatorcontrib>RUMP, ARNOLD</creatorcontrib><creatorcontrib>PINTER, STEFAN</creatorcontrib><creatorcontrib>FISCHER, FRANK</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>RUDHARD, JOACHIM</au><au>LAERMER, FRANZ</au><au>RUMP, ARNOLD</au><au>PINTER, STEFAN</au><au>FISCHER, FRANK</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>Micromechanical component used as an acceleration or rotation sensor in vehicles has functional components hanging above a substrate in a functional layer</title><date>2002-04-18</date><risdate>2002</risdate><abstract>Micromechanical component has functional components hanging above a substrate (10) in a functional layer (12). Opposite lying surfaces of the functional components are partially covered with a conducting foil. An Independent claim is also included for a process for the production of a micromechanical component. Preferred Features: The conducting foil is a metal foil, especially made from aluminum, an alloy based on AlSi and AlSiCu, nickel or a NiSi alloy. The opposite lying surfaces of the functional components are vertical walls of trenches. The substrate is a silicon substrate with a sacrificial layer (11) on. The functional layer is polysilicon.
Die Erfindung schafft ein mikromechanisches Bauelement, insbesondere einen Beschleunigungs- oder Drehratensensor, mit oberhalb eines Substrates (10) beweglich aufgehängten Funktionskomponenten (12), wobei gegenüberliegende Flächen der Funktionskomponenten (12) aufeinander zu beweglich sind. Die gegenüberliegenden Flächen der Funktionskomponenten (12) sind zumindest teilweise mit einem leitfähigen Film (60) überzogen.</abstract><edition>7</edition><oa>free_for_read</oa></addata></record> |
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| subjects | BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY GYROSCOPIC INSTRUMENTS INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT MEASURING MEASURING DISTANCES, LEVELS OR BEARINGS MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION,OR SHOCK MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES MICROSTRUCTURAL TECHNOLOGY NAVIGATION PERFORMING OPERATIONS PHOTOGRAMMETRY OR VIDEOGRAMMETRY PHYSICS PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTUREOR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS SEMICONDUCTOR DEVICES SURVEYING TESTING TRANSPORTING |
| title | Micromechanical component used as an acceleration or rotation sensor in vehicles has functional components hanging above a substrate in a functional layer |
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