VERFAHREN ZUR DIFFUSION VON PHOSPHOR UND BOR IN SILIZIUM

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Hauptverfasser: HADAMOVSKY,HANS-FRIEDRICH,DD, KAMPRATH,WERNER,DD, MOHR,ULRICH,DD, SAUER,JOERG,DD, GUENTHER,GERHARD,DD, WENZEK,RAINER,DD, SCHUETT,HEIDRUN,DD, MASER,KARL,DD, GEISLER,IRENE,DD, BEICHLER,HELMUT,DD
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creator HADAMOVSKY,HANS-FRIEDRICH,DD
KAMPRATH,WERNER,DD
MOHR,ULRICH,DD
SAUER,JOERG,DD
GUENTHER,GERHARD,DD
WENZEK,RAINER,DD
SCHUETT,HEIDRUN,DD
MASER,KARL,DD
GEISLER,IRENE,DD
BEICHLER,HELMUT,DD
description
format Patent
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source esp@cenet
subjects BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
title VERFAHREN ZUR DIFFUSION VON PHOSPHOR UND BOR IN SILIZIUM
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