VERFAHREN ZUR DIFFUSION VON PHOSPHOR UND BOR IN SILIZIUM
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creator | HADAMOVSKY,HANS-FRIEDRICH,DD KAMPRATH,WERNER,DD MOHR,ULRICH,DD SAUER,JOERG,DD GUENTHER,GERHARD,DD WENZEK,RAINER,DD SCHUETT,HEIDRUN,DD MASER,KARL,DD GEISLER,IRENE,DD BEICHLER,HELMUT,DD |
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fullrecord | <record><control><sourceid>epo_EVB</sourceid><recordid>TN_cdi_epo_espacenet_DD225263A1</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>DD225263A1</sourcerecordid><originalsourceid>FETCH-epo_espacenet_DD225263A13</originalsourceid><addsrcrecordid>eNrjZLAIcw1yc_QIcvVTiAoNUnDxdHMLDfb091MIA-IAD_9gIA5SCPVzUXAC0p5-CsGePp5RnqG-PAysaYk5xam8UJqbQd7NNcTZQze1ID8-tbggMTk1L7Uk3sXFyMjUyMzY0dCYsAoA3LwnuQ</addsrcrecordid><sourcetype>Open Access Repository</sourcetype><iscdi>true</iscdi><recordtype>patent</recordtype></control><display><type>patent</type><title>VERFAHREN ZUR DIFFUSION VON PHOSPHOR UND BOR IN SILIZIUM</title><source>esp@cenet</source><creator>HADAMOVSKY,HANS-FRIEDRICH,DD ; KAMPRATH,WERNER,DD ; MOHR,ULRICH,DD ; SAUER,JOERG,DD ; GUENTHER,GERHARD,DD ; WENZEK,RAINER,DD ; SCHUETT,HEIDRUN,DD ; MASER,KARL,DD ; GEISLER,IRENE,DD ; BEICHLER,HELMUT,DD</creator><creatorcontrib>HADAMOVSKY,HANS-FRIEDRICH,DD ; KAMPRATH,WERNER,DD ; MOHR,ULRICH,DD ; SAUER,JOERG,DD ; GUENTHER,GERHARD,DD ; WENZEK,RAINER,DD ; SCHUETT,HEIDRUN,DD ; MASER,KARL,DD ; GEISLER,IRENE,DD ; BEICHLER,HELMUT,DD</creatorcontrib><edition>4</edition><language>ger</language><subject>BASIC ELECTRIC ELEMENTS ; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ; ELECTRICITY ; SEMICONDUCTOR DEVICES</subject><creationdate>1985</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=19850724&DB=EPODOC&CC=DD&NR=225263A1$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,780,885,25564,76547</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=19850724&DB=EPODOC&CC=DD&NR=225263A1$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>HADAMOVSKY,HANS-FRIEDRICH,DD</creatorcontrib><creatorcontrib>KAMPRATH,WERNER,DD</creatorcontrib><creatorcontrib>MOHR,ULRICH,DD</creatorcontrib><creatorcontrib>SAUER,JOERG,DD</creatorcontrib><creatorcontrib>GUENTHER,GERHARD,DD</creatorcontrib><creatorcontrib>WENZEK,RAINER,DD</creatorcontrib><creatorcontrib>SCHUETT,HEIDRUN,DD</creatorcontrib><creatorcontrib>MASER,KARL,DD</creatorcontrib><creatorcontrib>GEISLER,IRENE,DD</creatorcontrib><creatorcontrib>BEICHLER,HELMUT,DD</creatorcontrib><title>VERFAHREN ZUR DIFFUSION VON PHOSPHOR UND BOR IN SILIZIUM</title><subject>BASIC ELECTRIC ELEMENTS</subject><subject>ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR</subject><subject>ELECTRICITY</subject><subject>SEMICONDUCTOR DEVICES</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>1985</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNrjZLAIcw1yc_QIcvVTiAoNUnDxdHMLDfb091MIA-IAD_9gIA5SCPVzUXAC0p5-CsGePp5RnqG-PAysaYk5xam8UJqbQd7NNcTZQze1ID8-tbggMTk1L7Uk3sXFyMjUyMzY0dCYsAoA3LwnuQ</recordid><startdate>19850724</startdate><enddate>19850724</enddate><creator>HADAMOVSKY,HANS-FRIEDRICH,DD</creator><creator>KAMPRATH,WERNER,DD</creator><creator>MOHR,ULRICH,DD</creator><creator>SAUER,JOERG,DD</creator><creator>GUENTHER,GERHARD,DD</creator><creator>WENZEK,RAINER,DD</creator><creator>SCHUETT,HEIDRUN,DD</creator><creator>MASER,KARL,DD</creator><creator>GEISLER,IRENE,DD</creator><creator>BEICHLER,HELMUT,DD</creator><scope>EVB</scope></search><sort><creationdate>19850724</creationdate><title>VERFAHREN ZUR DIFFUSION VON PHOSPHOR UND BOR IN SILIZIUM</title><author>HADAMOVSKY,HANS-FRIEDRICH,DD ; KAMPRATH,WERNER,DD ; MOHR,ULRICH,DD ; SAUER,JOERG,DD ; GUENTHER,GERHARD,DD ; WENZEK,RAINER,DD ; SCHUETT,HEIDRUN,DD ; MASER,KARL,DD ; GEISLER,IRENE,DD ; BEICHLER,HELMUT,DD</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_DD225263A13</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>ger</language><creationdate>1985</creationdate><topic>BASIC ELECTRIC ELEMENTS</topic><topic>ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR</topic><topic>ELECTRICITY</topic><topic>SEMICONDUCTOR DEVICES</topic><toplevel>online_resources</toplevel><creatorcontrib>HADAMOVSKY,HANS-FRIEDRICH,DD</creatorcontrib><creatorcontrib>KAMPRATH,WERNER,DD</creatorcontrib><creatorcontrib>MOHR,ULRICH,DD</creatorcontrib><creatorcontrib>SAUER,JOERG,DD</creatorcontrib><creatorcontrib>GUENTHER,GERHARD,DD</creatorcontrib><creatorcontrib>WENZEK,RAINER,DD</creatorcontrib><creatorcontrib>SCHUETT,HEIDRUN,DD</creatorcontrib><creatorcontrib>MASER,KARL,DD</creatorcontrib><creatorcontrib>GEISLER,IRENE,DD</creatorcontrib><creatorcontrib>BEICHLER,HELMUT,DD</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>HADAMOVSKY,HANS-FRIEDRICH,DD</au><au>KAMPRATH,WERNER,DD</au><au>MOHR,ULRICH,DD</au><au>SAUER,JOERG,DD</au><au>GUENTHER,GERHARD,DD</au><au>WENZEK,RAINER,DD</au><au>SCHUETT,HEIDRUN,DD</au><au>MASER,KARL,DD</au><au>GEISLER,IRENE,DD</au><au>BEICHLER,HELMUT,DD</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>VERFAHREN ZUR DIFFUSION VON PHOSPHOR UND BOR IN SILIZIUM</title><date>1985-07-24</date><risdate>1985</risdate><edition>4</edition><oa>free_for_read</oa></addata></record> |
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subjects | BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES |
title | VERFAHREN ZUR DIFFUSION VON PHOSPHOR UND BOR IN SILIZIUM |
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