PROCESS AND APPARATUS FOR LASER INTERFERENCE MEASURING OF LENGTHS IN TWO PERPENDICULAR COORDINATES WITH THERMAL EXPANSIVITY COMPENSATION

Bibliographische Detailangaben

Hauptverfasser:	KRSEK JIRI, JAKL MILOS
Format:	Patent
Sprache:	eng
Schlagworte:	MEASURING MEASURING ANGLES MEASURING AREAS MEASURING IRREGULARITIES OF SURFACES OR CONTOURS MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS OPTICS PHYSICS TESTING
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