Metal jacket crystal vacuum package appatus

The utility model discloses a metal-shell crystal vacuum encapsulation apparatus, which is composed of parts such as an upper electrode, a lower electrode, a vacuum box, a high and a low vacuum valves, a deflation valve, a vacuum valve, a vacuum gauge connection pipe, a dynamic seal ring, etc. The e...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: XIAOYANG ZHANG, JINGLU MA, ZHENYOU ZHANG
Format: Patent
Sprache:eng
Schlagworte:
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