Leakage bearing and liquid separating device

The utility model provides a leakage-bearing liquid separation device, which relates to the technical field of semiconductor equipment, and comprises an outer tank body, the top of the outer tank body is opened and is arranged below a liquid leakage port of wet process equipment, a motor is arranged...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser:	WU LINGFENG, LIU DAWEI, LU SAIHAO
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	ACTUATING-FLOATS BASIC ELECTRIC ELEMENTS BLASTING COCKS DEVICES FOR VENTING OR AERATING ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVEFUNCTIONING OF MACHINES OR INSTALLATIONS HEATING LIGHTING MECHANICAL ENGINEERING SEMICONDUCTOR DEVICES TAPS THERMAL INSULATION IN GENERAL VALVES WEAPONS
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