Leakage bearing and liquid separating device
The utility model provides a leakage-bearing liquid separation device, which relates to the technical field of semiconductor equipment, and comprises an outer tank body, the top of the outer tank body is opened and is arranged below a liquid leakage port of wet process equipment, a motor is arranged...
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| creator | WU LINGFENG LIU DAWEI LU SAIHAO |
| description | The utility model provides a leakage-bearing liquid separation device, which relates to the technical field of semiconductor equipment, and comprises an outer tank body, the top of the outer tank body is opened and is arranged below a liquid leakage port of wet process equipment, a motor is arranged on the inner wall of the bottom of the outer tank body, and a plurality of liquid discharge pipes corresponding to various liquid collectors respectively are arranged around the motor; the inner tank body is located in the outer tank body and installed on a rotating shaft of the motor, a liquid dropping opening is formed in the bottom of the inner tank body, an opening in the top of the inner tank body corresponds to a liquid leakage opening of the wet process equipment, and the motor drives the inner tank body to rotate so that the liquid dropping opening can correspond to the liquid discharging pipes respectively. The device has the beneficial effects that the motor can drive the inner tank body to rotate, so th |
| format | Patent |
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The device has the beneficial effects that the motor can drive the inner tank body to rotate, so th</description><language>chi ; eng</language><subject>ACTUATING-FLOATS ; BASIC ELECTRIC ELEMENTS ; BLASTING ; COCKS ; DEVICES FOR VENTING OR AERATING ; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ; ELECTRICITY ; ENGINEERING ELEMENTS AND UNITS ; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVEFUNCTIONING OF MACHINES OR INSTALLATIONS ; HEATING ; LIGHTING ; MECHANICAL ENGINEERING ; SEMICONDUCTOR DEVICES ; TAPS ; THERMAL INSULATION IN GENERAL ; VALVES ; WEAPONS</subject><creationdate>2024</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20240924&DB=EPODOC&CC=CN&NR=221762670U$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,776,881,25542,76289</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20240924&DB=EPODOC&CC=CN&NR=221762670U$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>WU LINGFENG</creatorcontrib><creatorcontrib>LIU DAWEI</creatorcontrib><creatorcontrib>LU SAIHAO</creatorcontrib><title>Leakage bearing and liquid separating device</title><description>The utility model provides a leakage-bearing liquid separation device, which relates to the technical field of semiconductor equipment, and comprises an outer tank body, the top of the outer tank body is opened and is arranged below a liquid leakage port of wet process equipment, a motor is arranged on the inner wall of the bottom of the outer tank body, and a plurality of liquid discharge pipes corresponding to various liquid collectors respectively are arranged around the motor; the inner tank body is located in the outer tank body and installed on a rotating shaft of the motor, a liquid dropping opening is formed in the bottom of the inner tank body, an opening in the top of the inner tank body corresponds to a liquid leakage opening of the wet process equipment, and the motor drives the inner tank body to rotate so that the liquid dropping opening can correspond to the liquid discharging pipes respectively. 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The device has the beneficial effects that the motor can drive the inner tank body to rotate, so th</abstract><oa>free_for_read</oa></addata></record> |
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| language | chi ; eng |
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| subjects | ACTUATING-FLOATS BASIC ELECTRIC ELEMENTS BLASTING COCKS DEVICES FOR VENTING OR AERATING ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVEFUNCTIONING OF MACHINES OR INSTALLATIONS HEATING LIGHTING MECHANICAL ENGINEERING SEMICONDUCTOR DEVICES TAPS THERMAL INSULATION IN GENERAL VALVES WEAPONS |
| title | Leakage bearing and liquid separating device |
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