Channel combining device and silicon wafer conveying system

Channel combining device and silicon wafer conveying system

The utility model discloses a channel combining device and a silicon wafer conveying system applying the channel combining device, the channel combining device comprises a plurality of feeding conveying belts, a transfer assembly, a discharging conveying belt, a first conveying assembly and a second...

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Hauptverfasser: WU FEIFEI, ZHANG FUMING, HUANG ZHANGNAN, ZHU LIANG, ZHANG JIANGSHUI, LI FENGXIANG, XIE LONGHUI
Format: Patent
Sprache:chi ; eng
Schlagworte:
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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creator WU FEIFEI
ZHANG FUMING
HUANG ZHANGNAN
ZHU LIANG
ZHANG JIANGSHUI
LI FENGXIANG
XIE LONGHUI
description The utility model discloses a channel combining device and a silicon wafer conveying system applying the channel combining device, the channel combining device comprises a plurality of feeding conveying belts, a transfer assembly, a discharging conveying belt, a first conveying assembly and a second conveying assembly, the plurality of feeding conveying belts are arranged in parallel at intervals so as to be suitable for respectively conveying workpieces in a plurality of processing channels; one end of the transferring assembly is connected with the discharging conveying belt so as to be suitable for transferring workpieces to the discharging conveying belt. The first conveying assembly can be alternately connected with the multiple feeding conveying belts or the transfer assembly, the second conveying assembly can be alternately connected with the multiple feeding conveying belts or the transfer assembly, and when the first conveying assembly is connected with any one of the multiple feeding conveying belts
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subjects BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
title Channel combining device and silicon wafer conveying system
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